研究期間：10108~10207;Quartz is the critical material used in MEMS due to its beneficial properties, such as piezo-electric effect and stable chemical properties. However, it is difficult to machine between the efficiency and accuracy using conventional methods. Electrochemical discharge machining (ECDM) is an emerging non-traditional machining process that involves high-temperature melting assisted by accelerated chemical etching. The electrochemical reaction affects the coalesce status of gas film in ECDM. The structure of gas film is in turn affected by efficiency and accuracy. Therefore, according the above issues, these researches will separate into three years to study： First year： To explore the variations in coalescence status of gas film on different tool electrode, and to examine the effect of gas film on machining performance. Second year：Maintain the electrochemical reaction to enhance the gas film stability so as to improve the ECDM performance by dual-model power supply. Third year： Using the spherical electrode with a multi diameter and curve surface to enhance machining efficiency in deep machining depth. And also create the precise micro-fabrication process.