雙模式電源應用於石英之電化學放電加工技術研究;Study of electrochemical discharge machining in quartz by dual-model power supply

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題名:	雙模式電源應用於石英之電化學放電加工技術研究;Study of electrochemical discharge machining in quartz by dual-model power supply
作者:	顏炳華
貢獻者:	國立中央大學機械工程學系
關鍵詞:	機械工程
日期:	2013-12-01
上傳時間:	2014-03-17 14:27:58 (UTC+8)
出版者:	行政院國家科學委員會
摘要:	研究期間：10208~10307;Quartz is the critical material used in MEMS due to its beneficial properties, such as piezo-electric effect and stable chemical properties. However, it is difficult to machine between the efficiency and accuracy using conventional methods. Electrochemical discharge machining (ECDM) is an emerging non-traditional machining process that involves high-temperature melting assisted by accelerated chemical etching. The electrochemical reaction affects the coalesce status of gas film in ECDM. The structure of gas film is in turn affected by efficiency and accuracy. Therefore, according the above issues, these researches will separate into three years to study： First year： To explore the variations in coalescence status of gas film on different tool electrode, and to examine the effect of gas film on machining performance. Second year：Maintain the electrochemical reaction to enhance the gas film stability so as to improve the ECDM performance by dual-model power supply. Third year： Using the spherical electrode with a multi diameter and curve surface to enhance machining efficiency in deep machining depth. And also create the precise micro-fabrication process.
關聯:	財團法人國家實驗研究院科技政策研究與資訊中心
顯示於類別:	[機械工程學系] 研究計畫

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