行星式腔體金屬有機化學氣相沉積熱流及濃度場模擬分析

NCUIR > Engineering College > Energy of Mechatronics > Electronic Thesis & Dissertation > Item 987654321/63498

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/63498

Title:	行星式腔體金屬有機化學氣相沉積熱流及濃度場模擬分析
Authors:	梁仕承;Liang,Shih-Cheng
Contributors:	能源工程研究所
Keywords:	行星式系統;有機化學氣相沉積;mocvd;GaN
Date:	2014-01-24
Issue Date:	2014-04-02 15:40:58 (UTC+8)
Publisher:	國立中央大學
Abstract:	氮化鎵為發光二極體的主要原料之一，而化學氣相沉積為控制氮化鎵生長品質的關鍵製程，均勻度為沉積品質最重要指標．常見穩定熱流場的方法有下列幾種，降低腔體高度，降低製程壓力，以減少浮力渦流的產生．本研究利用數值方法，透過改變公轉與自轉，而過高的載台轉速會造成旋轉渦流的產生，對熱流場的穩定有很大的影響．因此，在原有設計中改變自轉的速度，獲得有力且穩定層流之熱流場，可以使我們沉積更為均勻．除探討噴嘴分布與形狀，並分析製程中的質量傳輸場，藉由質傳的分布，可以發現分布的噴嘴濃度分布會在載台中心較高，而且減少自轉速度的濃度分布比較均勻，本研究也加上裂解化學反應，使我們對整體製程更加了解，做全方面的分析．此噴嘴最佳設計可以使濃度場均勻度，使得每個區域的濃度場可以保持穩定，達到最佳化的製程參數．最後，在此研究中，暫態的熱流模擬指出，對於沉積均勻性有很大的影響，在未達穩定時，為對流所主導，但擴散穩定之後，改變轉速，可以減少邊緣厚度達5nm。; GaN is one of the main material of light emitting diodes, and chemical vapor deposition control of the process of GaN growth quality and uniformity of deposition quality is the most important. The concept to be stable thermal and flow field are the following, to reduce the height of the chamber, reducing the process pressure, in order to reduce the buoyancy vortexes generation. In this study, we use numerical methods, changing the distribution and of the wafer rotation speed and revolution speed (satellite system). Excessive carrier rotation speed will generate of the rotating vortex , then great impact on the stability of the thermal field and flow field. Therefore, the change in the rotation distribution, strong and stable laminar flow field can be deposited more evenly. In addition to exploring the nozzle distribution and shape analysis of the field of mass transfer in the process, by the distribution of mass transfer, can be found center concentration distribution in slower self rotation, the average distribution of the concentration of more evenly distributed in satellite system, this study also coupled with a chemical reaction, so that we better understand the overall process, to do all aspects of the analysis. This design allows the concentration field uniformity making the concentration field in each region can maintain stability, reduce the amount of trimethylgallium to achieve less than 5um.
Appears in Collections:	[Energy of Mechatronics] Electronic Thesis & Dissertation

Files in This Item:

File	Description	Size	Format
index.html		0Kb	HTML	533	View/Open

社群 sharing

Loading...