本篇論文主要提出一個方法改進傳統的 Shack-Hartmann 波前檢測器。 此非準直系統下的量測系統大幅的減少系統中光學元件的數量，改善下列幾個傳統 Shack-Hartmann 波前檢測系統的幾樣缺點，以達到跟傳統Shack-Hartmann 波前檢測系統有相同效果：（1）光學元件自身帶有的像差（2）校準系統過程中光學元件錯位影響導致其他像差引入量測結果（3）縮短不同 NA 的量測鏡片時置換匹配的光學元件耗損的時間。;This thesis provide a new method improving the classical Shak-Hartmann wavefront sensor system(SHWS). Compare with the classical SHWS system, there are two advantages in this new measurement system : 1. Avoiding the wavefront aberration error by removing the collimator lens and the optical elements of the image system in the SHWS. 2. Increasing the measurement efficiency during we replace tested lens with different numerical aperture .
