外腔可調式雷射二極體絕對測長之研究

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/6671

Title:	外腔可調式雷射二極體絕對測長之研究
Authors:	張銓仲;Quan-Zhung Zhang
Contributors:	光電科學研究所
Date:	2001-06-13
Issue Date:	2009-09-22 10:25:27 (UTC+8)
Publisher:	國立中央大學圖書館
Abstract:	本論文研究的主題為絕對式測長(Absolute distance measurement)，由於絕對式測長具有在量測長度時不須移動量測物體的優點，因此廣泛運用於大尺度的量測之上，如飛機、工廠等等長距離的量測，論文中採用波長掃描外差干涉術(Wavelength scanning heterodyne interferometery)，至於干涉光源的選用，則是運用雷射二極體(laser diode) 易於調變波長的特性來達到波長掃描的能力。論文將研究著重於短距離的量測，並藉由適當的精度估算選擇適當的量測架構，最後採用波長儀來量測雷射二極體的波長；並藉由誤差分析考慮了空氣色散特性、餘弦誤差、整型稜鏡以及光源波長不穩定性對於量測結果的精度影響，最後經實驗本系統在公分等級的量測精度為 2.82×10-5，且解析度可達1μm。並將此系統運用於玻璃折射率的量測，且經過誤差分析得知量測折射率的精度小於0.5﹪。 II Abstract In this paper, using the wavelength scanning heterodyne method to establish the absolute distance interferometer (ADI), in this ADI system applied the tunable external cavity laser diode to achieve the wavelength scanning instead of using many laser in the ADI system. By using some analysis we chose the wavemeter to measure the wavelength of the laser diode and after the error analysis we calculated the effect of air dispersion、the cosine error、the anamorphic prism pair and the wavelength unstable to the ADI system. In the ADI system, this research focus on the distance in the range of 10-2 meter order and by the experiment got the result of 1-micrometer resolution and accuracy of 2.85×10-5. Finally also applied the ADI system to measure the index of some kinds of glass, and after the analysis the accuracy of index measurement is smaller then 0.5﹪.
Appears in Collections:	[Graduate Institute of Optics and Photonics] Electronic Thesis & Dissertation

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