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|Title: ||基於全內反射波長調制外差干涉術小角度測量;Small-angle Measurement Based on Total Internal Reflection Using Wavelength-modulated Heterodyne Interferometry|
|Keywords: ||全內反射;波長調制;外差干涉;小角度測量;The total internal reflection;Wavelength-modulated;Heterodyne interferometry;Small angle measurement|
|Issue Date: ||2015-05-08 15:36:35 (UTC+8)|
實驗測量結果與理論基本相符合，測量特性分析主要包括靈敏度、解析度、線性化處理、相對折射率因素、相位穩定性與誤差分析。差分共光路光學架構中，除去正入射零點測量，測量範圍約達到10度，靈敏度達到700，解析度達到0.0014度。;Taking the advantages of polarized light’s characteristics, the method of measuring small angle based on total internal reflection has the advantages of being susceptible to environmental impact, adjustable measuring range and small size in the field of optical angle measurement which could make it possess the potential applications in on-line measurement and space-constrained fields. However, the widespread use of electro-optic modulator devices such as the expensive frequency shift which limits its applications. In order to solve this problem, the thesis develops a new method to modulate the wavelength of laser directly called wavelength-modulated heterodyne interferometry , the validity of this method is demonstrated. What’s more, a new differential common-path optical configuration has been developed, and it has the advantages of simple structure, small size and low cost.
There are two optical configurations studyed in the thesis. One is called single optical path configuration studied to verify the method of wavelength-modulated heterodyne interferometry’s feasibility. The other configuration called differential common-path optical configuration adds one quarter-wave plate and a mirror on the basis of a single path configuration. The modulated signals produced by the FG(function generator) is used to modulate the wavelength of laser. Due to the total reflection effect, the angular variations of the rotation stage is loaded in the phases of P light and S light which own the optical path difference. Finally, an oscilloscope is used to measure the phases of the heterodyne signals.
The experimental results are in agreement with the theoretical analysis. The analysis of the measurement characteristics include sensitivity, resolution, linearization, relative refractive index factors, the stability of the phases and the error analysis. In regard to the differential common-path optical configuration, the measurement range is about 10 degrees except the nomal incidence, the best sensitivity is 700 and the best resolution is 0.0014 degrees.
|Appears in Collections:||[機械工程研究所] 博碩士論文|
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