我們利用光束傳播法來模擬光在絕緣層上矽晶波導的損耗,包含耦合損耗,彎曲損耗,以及傳播損耗.先最佳化出波導最佳的傳導截面來達到最小損耗,再進一步模擬一對八的200GHz的陣列波導光柵和一對八的光分歧器並製作出來,並探討元件的損耗. In this work, we used beam propagation method to simulate the optical losses, including of coupling loss, bending loss, and propagation loss, in silicon-on-insulator-based waveguides. The optimized dimensions of the waveguides for light propagation with low losses were studied. According to the waveguide dimensions, we designed and fabricated a 1x8 200GHz arrayed-waveguide grating (AWG) and a 1x8 multimode interference (MMI) power splitter in silicon-on-insulator wafer. The origin of optical losses of these devices were discussed.
