English  |  正體中文  |  简体中文  |  Items with full text/Total items : 73032/73032 (100%)
Visitors : 23388308      Online Users : 462
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version

    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/6806

    Title: 大面積低溫微波電漿輔助化學氣相沉積矽薄膜之研究Apply;microwave PECVD to deposit silicon thin film at low temperature.
    Authors: 林桔仁;Gi-Zen Lin
    Contributors: 光電科學研究所
    Keywords: 矽薄膜;微波;電漿;多晶矽;液晶;silicon;microwave;pecvd
    Date: 2004-07-05
    Issue Date: 2009-09-22 10:28:59 (UTC+8)
    Publisher: 國立中央大學圖書館
    Abstract: 摘要 本實驗採用大面積化微波電漿輔助化學氣相沉積系統,研究沉積低溫多晶矽的最佳參數。以矽甲烷、氫氣、氬氣為反應氣體原料。藉由改變微波、高週波功率、反應氣體流量、鍍膜時間等參數,來研究對薄膜品質的影響。另外我們以掃描式電子顯微鏡、原子力掃描顯微鏡、X-Ray繞射儀、傅利葉紅外光譜儀、及探針測厚儀來鑑定薄膜的品質與特性。經由實驗觀察,在矽甲烷流量1 scmm、在氫氣流量25 sccm、氬氣流量50 sccm、微波功率700 W、高週波功率15 W、鍍膜時間7 hrs的參數下。薄膜試片在電子顯微鏡與原子力顯微鏡下可以看到較大晶粒尺寸的顆粒沉積,晶粒尺寸可達100 nm。經X-Ray繞射儀分析,沒有明顯的繞射峰、經傅利葉紅外光譜儀分析,薄膜含有Si-H與Si-H2鍵結。 Abstract It applies microwave PECVD to deposit silicon thin film at low temperature,searching for the best parameter of low temperature poly silicon.Our gas source are silane,hydrogen,and argon,and we study the quality of thin film by changing some parameter.After deposition,we analyse the thin film by SEM,AFM,X-Ray Diffraction,FTIR,and α-Step.We find the best parameter when silane,hydrogen,and argon flow are 1,25,and 50 sccm,respectively,microwave power and rf power are 700W and 15W.respectively,deposition time is 7 hrs.After analysing the sample, we can find grain size which is larger than 100 nm by SEM and AFM,without diffraction peak by XRD,with Si-H and Si-H2 by FTIR.
    Appears in Collections:[光電科學研究所] 博碩士論文

    Files in This Item:

    File SizeFormat

    All items in NCUIR are protected by copyright, with all rights reserved.

    社群 sharing

    ::: Copyright National Central University. | 國立中央大學圖書館版權所有 | 收藏本站 | 設為首頁 | 最佳瀏覽畫面: 1024*768 | 建站日期:8-24-2009 :::
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback  - 隱私權政策聲明