摘要 DWDM薄膜干涉濾光片已廣泛應用於光纖通訊系統中，為提高光纖通訊系統之可靠度，溫度對於其光學穩定性的影響就顯得越來越重要。符合國際規範的100GHz DWDM濾光片，其溫飄值必須要小於1pm/℃。本論文利用不同膜層設計、不同基板種類及鍍膜材料所製鍍五腔式之DWDM濾光片來做溫飄量測，找出符合商用規格的100GHz DWDM濾光片。從本文研究中發現基板尺寸大小、膜層厚度以及選用的高折射率材料及基板種類皆會影響溫飄值，鍍膜材料使用氧化鈮(Nb2O5)及氧化矽(SiO2)，玻璃基板為WMS02所製鍍出177層的100GHz DWDM濾光片，其尺寸為1.4mm×1.4mm×1.0mm，溫飄值0.148pm/℃為最佳值。 Abstract DWDM filters have been widely used in fiber-communication system. In order to increase its reliability, the temperature effect to the optical stability of the DWDM filters will become more and more important. The TSCW(Temperature Shift of Central Wavelength) of 100GHz DWDM filters in international specification is less than 1pm/℃. The main subject of this study is to measure the five cavities of different thin film design, different type of substrate, and different coating material in order to choose the 100GHz DWDM filters that fit the commercial specification. From this study, we find that the size of substrate, thickness of thin film, type of substrate, and the chosen high refractive index material may influence the TSCW. The best value of TSCW is 0.418pm/℃ which coating materials are Nb2O5 and SiO2, the number of the thin film layers is 117, substrate is WMS02, and the size is 1.4mm×1.4mm×1.0mm.