以電漿表面預處理法; 在塑膠基板上製鍍抗反射膜 Anti-Reflection Coating on Plastic Substrate Treated by Low Pressure Plasma

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题名:	以電漿表面預處理法;在塑膠基板上製鍍抗反射膜 Anti-Reflection Coating on Plastic Substrate Treated by Low Pressure Plasma
作者:	王宣文;Shuan-Wen Wang
贡献者:	光電科學研究所
关键词:	塑膠基板;表面處理;電漿;抗反射膜;plastic substrate;anti-reflection coating;plasma
日期:	2005-07-07
上传时间:	2009-09-22 10:29:59 (UTC+8)
出版者:	國立中央大學圖書館
摘要:	近年來，塑膠基板在光學元件中的應用，日漸增加，凸顯了塑膠基板鍍膜的重要性，但是薄膜材料與塑膠基板間的附著性不佳，為目前主要待克服的問題點。為了克服此問題，本研究選擇了電漿表面預處理法作為研究方向，來增加薄膜與基板的附著力。重點在探討以不同氣體與預處理功率及不同處理時間的情況下，對塑膠基板的表面粗糙度、化學鍵結與光學特性產生之變化。除此之外，也以預處理過的基板繼續鍍上Ta2O5單層膜，來探討基板與薄膜材料間中間層﹙interface layer﹚折射率不連續之現象，以及測試Ta2O5之附著性。研究結果顯示，基板經電漿表面預處理後，在基板表面有中間層產生，且薄膜與基板的附著改善的程度，與電漿的功率及處理時間有關。功率高時，處理時間短，便可得到附著力增進的效果；功率低時，所需處理時間就比較長。但是高功率電漿處理由於電漿反應較為劇烈，容易使基板表面之性質改變以及因高溫所累積的熱而產生形變，故改採長時間、低功率電漿處理，同時加上電極冷卻，以避免熱的因素。本研究以模擬中間層的厚度與折射率設計膜層，並經優化修正後，已可鍍出於可見光區﹙420~670nm﹚反射率小於1%且附著佳的抗反射膜。 The application of plastic substrates in optical components increased recently. The limitation in using plastic substrates for optical components was the poor adherence between thin films and substrates. This research focused on plasma surface treatment to enhance the adhesion. The change of surface roughness, chemical bonding, substrate transmittance with different gas and pre-treatment power was investigated. In addition, we coated Ta2O5 single layer on substrates after pre-treatment to find out the phenomenon of the inhomogeneity as well as the adhesion degree between Ta2O5 and plastic substrate. The results revealed that the improvement of adhesion related to plasma power and pre-treatment time. It took shorter time to reach good adhesion under high plasma power, while longer time under low plasma power. But, high power plasma treatment caused substrate overheated due to the volatile interaction between plasma and substrates. So we chose low power treatment with longer time as well as cathode cooling. Finally, it is found that by refining the design of anti-reflection coating with an interface layer, an anti-reflection coating on plastic substrates with good adhesion can be made.
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