電漿輔助低溫化學氣相沉積法直接成長石墨烯/金屬複合透明導電薄膜;Direct growth graphene / metal composite transparent conductive film by low temperature plasma enhanced chemical vapor deposition

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题名:	電漿輔助低溫化學氣相沉積法直接成長石墨烯/金屬複合透明導電薄膜;Direct growth graphene / metal composite transparent conductive film by low temperature plasma enhanced chemical vapor deposition
作者:	魏健桓;Wei,Chien-Huan
贡献者:	能源工程研究所
关键词:	鎳;磁控濺鍍;低溫;電漿輔助化學氣相沉積法;石墨烯;Nickel;magnetron sputter;low temperature;plasma enhanced chemical vapor deposition (PECVD);graphene
日期:	2015-08-26
上传时间:	2015-09-23 11:57:49 (UTC+8)
出版者:	國立中央大學
摘要:	石墨烯為近幾年備受矚目的材料之一，其擁有優異的電性、高穿透率及高導熱性，亦為可撓曲的透明導電薄膜，目前的研究皆希望取代傳統的透明導電膜如氧化鋅鋁(AZO)、氧化銦錫(ITO)等。由於石墨烯需在高溫環境以金屬催化合成，現有的光電產品皆無法承受其高溫製程(1000 ℃)，必須依靠轉印的方式來使用。本研究為了解決高溫製程與轉印步驟，提出直接成長石墨烯在光電產品的方式，先使用磁控濺鍍法鍍製超薄且高穿透率的金屬薄膜作為成長石墨烯的催化金屬，為了保持透明度，此金屬膜穿透率必須在80 %@550 nm以上(包含透明基板，如玻璃基板、石英基板、藍寶石基板等等)，厚度必須要在5奈米以下，再使用電漿輔助低溫化學氣相沉積法於250 ℃成長石墨烯，得到石墨烯/金屬複合透明導電薄膜，片電阻值為755.48 ohm/sq，穿透率維持在近75 % @ 550 nm，完成可直接成長在光電產品上之透明導電薄膜的研究。並同時研究低溫直接成長石墨烯於基板上的技術，利用鎳金屬的溶入-析出特性，以低溫製程的電漿輔助化學氣相沉積法直接成長石墨烯於基板上。 ;Graphene is one of the popular materials in recent years, which has excellent electrical properties, high transmittance and high thermal conductivity; it can also be the flexible transparent conductive film. The present research are hoped to replace the traditional transparent conductive, such as Aluminum Zinc Oxide (AZO), Indium Tin oxide (ITO) etc. Because of graphene growth required a metal catalytic synthesis at very high temperature (1000 ℃), and the photovoltaic products are unable to process high-temperature. So, to replace the traditional transparent conductive by graphene, there are many challenges to overcome. In this study, the objective is directly grown graphene on optoelectronic products without high temperature process and transfer. First, coating the high transmittance metal film as the catalytic metal by magnetron sputter, and then growth graphene on metal thin film by low-temperature plasma enhanced chemical vapor deposition (PECVD), in order to maintain transparency, the metal film transmittance must be more than 80% at 550 nm (containing a transparent substrate, such as glass, quartz, sapphire, etc.), and the thickness must be 5 nm or less. Then use a low temperature plasma enhanced chemical vapor deposition to grow graphene at 250 ℃. The result is the graphene / metal composite transparent conductive film, which sheet resistance was 755.48 ohm / square, and transmittance remained at nearly 75% at 550 nm, complete growth in direct research on the transparent conductive film photovoltaic products. And research the low temperature process of PECVD of directly grown graphene on the substrate by using nickel′s characteristics: dissolved and precipitation.
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