在此論文中，我們利用矽晶片來對波導元件製作及設計。其中，波導元件包含了1×8分光器、陣列波導光柵、錐狀波導及梳狀致動器。而在分光器中，我們設計了三種不同結構的1×8分光器，包含了1×8多模干涉分光器、Y型分叉分光器及1×2×2×2多模干涉分光器。這三種結構中，在loss、uniformity及device size的考量之下，1×8多模干涉分光器會有較好的效果。在陣列波導光柵方面，我們有效的控制陣列波導間距、輸出波導間距及星型耦合器長度提高陣列波導光柵之分光效果。而在上述之波導元件中，我們提出了錐狀波導之結構以減少元件在量測時之損耗。 而在梳狀致動器方面，我們以SOI作為梳狀致動器之結構，並利用Matlab軟體來輔助完成設計的工作，完成了梳狀致動器之設計，並改變可動部份之結構以增加元件之挺性。 In this work, we have performed the simulation, fabrication and characterization of the silicon on insulator (SOI). 1×8 power splitters, Array Waveguide Grating(AWG), taper waveguides and comb drive attenuators are studied. Three types of 1×8 power splitters are investigated, including 1×8 multi-mode interference(MMI) splitters, 1×2×2×2 MMI splitters and 1×8 Y-branch splitters. Losses, uniformity and device sizes are compared for different splitters. Among these three kinds of structures, 1×8 power MMI splitters possess the best performance. For the results of AWG, the accurate distance control of array waveguides, output waveguides and length of star coupler can ameliorate the performance of the AWG. We also propose a taper structure attached to waveguides to reduce the coupling losses. In the comb drive attenuator, the component is fabricated in SOI wafer. Novel comb drive attenuator structures are proposed to solve the sticking problem.
