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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/6898


    Title: 193nm深紫外光斜向薄膜之研究;The Research of Obliquely Deposited Films at 193nm
    Authors: 卓文浩;Wen-Hao Cho
    Contributors: 光電科學研究所
    Keywords: 柱狀結構;斜向蒸鍍;深紫外光;DUV;column structure;obliquely deposited
    Date: 2006-06-29
    Issue Date: 2009-09-22 10:31:32 (UTC+8)
    Publisher: 國立中央大學圖書館
    Abstract: 本論文對氟化鎂、氟化鑭、氟化釓三種材料做蒸鍍角度從20 度 到70 度斜向蒸鍍,量測其柱狀傾斜角、應力以及薄膜對P、S 偏振光 垂直入射於波長193nm 的折射率。柱狀傾斜角以掃瞄式電子顯微鏡 觀察之,應力以相位移式應力量測干涉儀測量,折射率則以橢偏儀量 測,並以Cauchy Law 做擬合。柱狀傾斜角方面發現Tangent rule: tan??E ?tan?的係數E 只有在蒸鍍角度大於50 度才會趨於定值, 不同材料其係數E 不同。隨著蒸鍍角鍍的增大會有壓應力的趨勢。然 而雙折射的特性並不是單純的隨蒸鍍角度增加而遞增,氟化鎂在蒸鍍 角度為70 度時有最大的折射率差異(0.0576)。氟化鑭需在30 度至60 度之間才明顯的折射率差異,其值約在0.03?0.04 之間。而氟化釓在 蒸鍍角度從40 度到50 度之間Ns 與Np 的大小會相反過來。應力方 面會隨著蒸鍍角度有先上升在減小的現象。 Obliquely depositing Magnesium fluoride, Lanthanum fluoride, and Gadolinium fluoride for deposition angles in the range 20°–70°. Column angles were determined ex situ from scanning electron microscopy photographs of deposition-plane fractures. Stress was measured from Phase-Shifting Interferometer. The birefringence,Δn = Ns – Np, was determined from ellipsometer and fitted by Cauchy despersion law. We show that the experimental column angles correspond the value predicted by the modified form of the tangent-rule equation ??tan?1(E ?tan?) where E is a constant for deposition angle that is larger than 50°. When the deposition angel becomes large, the stress trend toward compressive stress. However, birefringence does not increase progressively with the deposition increases.Birefringence, Δ n = Ns – Np, of Magnesium fluoride is 0.0576 for deposition angle in 70°. Birefringence of Lanthanum fluoride becomes clear for deposition angle in the rang 30°-60°. Δn = 0.037 for deposition angle in 60°. However theΔn of Gadolinium fluoride would be cross during deposition angle in 40° and 50°.When the deposition angle was increased, the stress would increase first and then decrease progressively.
    Appears in Collections:[光電科學研究所] 博碩士論文

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