相位移動器校正之研究; Calibration of the phase-shifting adapter

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/6907

Title:	相位移動器校正之研究;Calibration of the phase-shifting adapter
Authors:	盧立瑋;Li-Wei Lu
Contributors:	光電科學研究所
Keywords:	相位移動器;相位移校正;壓電材料;phase-shifting adapter;phase-shifting calibration;piezoelectric ceramic
Date:	2006-07-10
Issue Date:	2009-09-22 10:31:47 (UTC+8)
Publisher:	國立中央大學圖書館
Abstract:	相移精度於相移干涉術之量測，是最可代表樣品資料之可靠度。對利用相移干涉術來量測樣品之干涉儀而言，不準確之相移會在計算物體相位上產生誤差。本系統之相位移動器係由三個壓電致動器所構成，因為壓電致動器本身之差異與結構上受到不同應力之影響，在移動的過程中會產生移動不均的問題，意即在推進過程中改變參考面之法線向量，最直接的觀察方式為推動一週期後比較前後之干涉圖，干涉條紋有旋轉與間隔改變之現象，此現象亦反應在相位移之標準差。針對此問題之解決方式，本論文提出一種校正相位移動器的方式，從理論推導出壓電致動器位移與條紋斜率之關係，從此關係中找出一特殊情況來校正，此方式利用條紋之變化來對壓電致動器之差異進行個別調校，從比對第一張與最後一張影像之差異變化，可發現利用此方法所得到之權重比例，的確改善了移動不均之現象。 The error of the movements of the phase-shifting adapter(PSA) determines the accuracy of measurement to a large degree. For large-apeture and weighty optical elements, we usually use an adapter with three PZTs to hold the tested optical element. It is very important to keep the adapter stretched as a flat. Otherwise, the shifting fringe patterns will rotate, and the distance between fringes will be changed. These phenomena will decrease the precision of phase-shifting interferometry. In this thesis, a method to calibrate a phase-shifting adapter with three piezoelectric ceramics based on the relationship between the displacement of PZT and the slope of interference fringe is proposed to increase the testing precision of phase-shifting interferometer. Observing the first and the last interferograms, the unequal movement of the PSA is improved by this method.
Appears in Collections:	[Graduate Institute of Optics and Photonics] Electronic Thesis & Dissertation

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