本研究主要為探討半導體製程廢水中所含之氫氧化四甲基銨(Tetramethylammonium hydroxide, TMAH) 以樹脂離子交換方式處理可有效達到法規規範 < 30 ppm(竹科管理局規範)為目的進行之相關實驗研究。在研究初設實驗規劃上可分為產業界及學術界中較常用之生物及蒸餾處理模式進行評估測試，惟在實廠進行水質處理測試時都無法達到較有效改善使廢水中氫氧化四甲基銨穩定降至法規規範，檢測主要為廢水中含有濃度不均之H2O2影響，或是無法有效排除其設計之安全顧慮等。因此研究提出新的處理模式”樹脂離子交換法”進行評估，透過在學理及實驗後得到相關改善數據，進而建置系統進行水質處理測試，再透過系統回饋分析及監測儀器的建置，使廢水放流水質之氫氧化四甲基銨可穩定達到法規標準之下。 在樹脂離子交換法實驗的過程中利用，本論文先依據學理離子交換驗證樹脂對於TMA+進行離子交換機制外，還針對其可能影響去除TMAH效率之變數，如pH值、雙氧水濃度等系統相關運轉參數等進行分析監控，以求得廢水在穩定的運轉模式下氫氧化四甲基銨可有效去除，其分析所的之結論不僅驗證了此方式的可行性，有效改善半導體廠廢水外排中TMAH超標疑慮，亦將其處理後之產水運用於生物養殖，達到廢水再利用的里程碑，故其實質效益實可作為未來其他半導體業或它廠建置或運轉處裡TMAH方式的評估。;Due to laws added and the consciousness upgrade of environmental for industrial wastewater in the pollution materials control. How to avoid and protect our environment from the pollution of industrial wastewater? It is very important!! High concentrations of Tetramethylammonium hydroxide (TMAH) can be found in industrial wastewater from semiconductor manufacturing process. Tetramethylammonium hydroxide(TMAH) is highly toxic and corrosive, thus it have to be properly wastewater treatment processes are still not satisfactorily effective, which because oxide issue. Therefore resin is proposed to remove Tetramethylammonium hydroxide(TMAH) from wastewater ion exchange process. In this study, ion exchange of resin process using strong acid (SAC) cation exchange resin were used to remove TMAH from wastewater solution. The solution to showed high TMA+ ion could removal to 30 ppm. Investigation on the effect of pH and H2O2 concentration was more affected, so we setting monitor system to control resin efficiency. The showing a promising and efficient capability to remove and control TMAH from wastewater.
