聚光型太陽能電池系統(CPV)，通常選用高光電轉換效率的三五族太陽能電池，搭配高聚光倍率的光學元件，使系統能產出更多電力，若能使太陽能電池轉換效率或聚光能力提高，將獲得更高單位能量密度，利於再生能源發展。 一般三五族單接面太陽能電池多採用金屬作為電極，本研究利用銦錫氧化物薄膜取代一般金屬，藉由此材料的高透光且可導電的性質作為電極使用，製作不同電極樣式的太陽能電池比較其轉換效率，區分成僅有銦錫氧化物薄膜以及有加入金屬層輔助銦錫氧化物薄膜導電的兩種類型，透過黃光微影製程製作出傳輸線模型(TLM)，經由不同的熱退火溫度及時間找到接觸電阻值最佳的金屬層結構，為分別堆疊金鍺合金(25nm)/鎳(15nm)/金(60nm)再進行熱退火處理400℃、60秒有最好的結果，再將此結構轉移到太陽能電池上，並製作出上述兩種類型太陽能電池比較轉換效率，結果顯示最佳的轉換效率達8.46%，相較一般市售同類型太陽能電池20%的轉換效率差距約11%，若能修正薄膜問題以及其他製程誤差，相信能更接近市售水準，達到降低製作成本及製程步驟的功效。 ;Concentrating photovoltaics systems usually choose III-V compound materials as the solar cells because of the high efficiency. Using the optical component with the high concentration ratio, we can obtain much more power from the system. If we are able to increase the efficiency of solar cell or lower down the manufacturing cost, it will be very helpful for the development of renewable-energy technology. In this thesis, we have used the indium tin oxide (ITO) film to replace the metal as the electrode of a single-junction solar cell, on account of ITO’s high transmission in visible light spectrum and conductive ability. We have designed different kinds of electrode patterns and classified as two types: (1) electrode with only ITO film, (2) electrode with auxiliary metal pads beneath the ITO film. By means of the standard semiconductor process, we have made samples for the experiment of transmission line model (TLM). The temperature and the time of thermal process were varied to find out the structure of the metal pads with lowest specific contact resistance. The best result was derived by stacking AuGe(25nm)/Ni(15nm)/Au(70nm) with the thermal anneal of 400℃for 60 seconds, and the specific contact resistance was 3.33×〖10〗^(-6) Ω-〖cm〗^2. Then We transferred this structure into a solar cell and compared it to the ITO-only electrode. The best efficiency of solar cell with the ITO-only electrode was measured as 8.46%, which was about 11% lower than that of a commercial cell. If some fabrication issues, such as the discontinuous ITO film, can be solved, the III-V solar cell with the ITO-only electrode proposed herein will not only have the advantages of low cost and simple processing but also have the highly improved efficiency.
