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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/6977

    Title: 脈衝式離子源助鍍氟化鎂薄膜之研究;The research of pulse ion beam-assisted deposition of magnesium fluoride thin film
    Authors: 練政廷;Cheng-Ting Lian
    Contributors: 光電科學研究所
    Keywords: 離子源;氟化鎂;ion source;magnesium fluoride
    Date: 2007-06-28
    Issue Date: 2009-09-22 10:33:46 (UTC+8)
    Publisher: 國立中央大學圖書館
    Abstract: 本論文是以熱阻舟蒸鍍系統配合脈衝式離子助鍍氟化鎂(MgF2)薄膜,研究脈衝式離子源對氟化鎂薄膜的光學特性、水氣吸收特性、微觀結構、表面粗糙度、應力與結晶特性的影響。   光學特性方面,在Constant Mode 離子助鍍下,氟化鎂薄膜的折射率明顯增加了,但是在短波段有著較大的光學損耗,相較於Constant Mode,在Pulse Mode 離子助鍍下,薄膜在短波長的光學損耗明顯減小了,但是有水氣吸收的現象發生;微觀結構方面,在離子助鍍下,薄膜的柱狀結構變得較明顯,柱與柱之間較緻密,薄膜的表面粗糙度在離子助鍍下,隨著Beam Current 增加有變小的趨勢;結晶特性方面,在離子助鍍下,結晶型態並無改變,但是薄膜的結晶方向更一致;應力方面,在Beam Current 1.0A 隨著Beam Current 增加,薄膜的壓應力越來越大。  The deposition of magnesium fluoride optical thin film by using thermal boat evaporation with pulse ion-assisted deposition (IAD) for UV application was investigated in this thesis. Due to the ion beam assistance, the optical properties and micro-structural properties of the magnesium fluorides thin films, including refractive index, surface roughness were significantly improved which are required in laser material processing and semiconductor lithography.
    Appears in Collections:[光電科學研究所] 博碩士論文

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