現今高精密度的製造業要求更加準確、精確和迅速的量測學，而相移干涉學正是目前許多工業所倚重的一門量測的學問，相移精度對於相移干涉術之量測，是最可代表樣品之可靠度。對利用相移干涉術來量測樣品之干涉儀而言，不準確的相移會在計算物體相位上而產生誤差，如此，無法準確的得到物體的表面資訊。 本系統之相位移動器由三個壓電致動器所構成，由於壓電致動器本身之差異與結構上受到不同應力的影響，在移動的過程中會產生移動不均勻的問題；為了提高其精準度，本文章提出一種有效提升精確度的校正方法，從理論推導出壓電致動器位移與條紋斜率之關係，接著主要是利用傅立葉轉換後，在空間頻率座標上之訊號為兩個脈衝函數值，並藉由兩點之連線求得其斜率，再由輸入電壓與條紋斜率變化之關係，得知各PZT之間的差異，來完成校正各PZT之工作，再藉由五步相移將其相位值計算出來，可發現此方法的確改善移動不均勻的現象，未經校正時，相位移誤差之RMS值為3.492 deg，約為0.0194λ，而經校正後，相位移誤差之RMS值最好可降低至0.062 deg，約為0.0034λ，證明出此方法有效的提升相位移動的精確度。The precision of phase-shift to the measurement of phase-shift interferometry may most represent reliability of a sample. It is represented the reliability of the sample that the measurement of the phase-shift accuracy for the phase-shift interferometry. In this thesis, a method to calibrate a phase-shifting adapter (PSA) with three piezoelectric ceramics based on the relationship between the displacement of PZT and the slope of interference fringe is proposed to increase the testing precision of phase-shifting interferometer. The unequal movement of the PSA is improved by this method. The paper proposed that the relations between shifting and the slope of interference fringe for phase-shifting adapter. Subsequently used flat plate interferogram as a sinusoidal wave and transferred from Fourier transform. Signals in frequency domain were two values of pulse functions, and calculated the slope by connecting the points. Before the phase-shifting adapter is calibrated, the RMS of phase shift error is 0.3492 deg, which is equal to 0.0194λ. After the phase-shifting adapter is calibrated, the RMS of phase shift error is 0.0621 deg, which is equal to 0.00004λ.It is found that this method really improved the phenomenon of moving unevenness, and advanced precision of phase-shift effectively.
