本論文研究光學讀寫頭的設計以及應用在角度量測的模擬，在論文前半部提出一個模組化雙波長讀寫頭的設計，在光學設計部分，使用兩分光鏡讓兩波長雷射共用光軸，簡化對準程序，提高光學品質；並結合微光機電系統製程，使用矽光學平台達到模組化目的。同時針對讀寫頭光學設計要求、生產組裝要求及實際操作要求，利用光學軟體進行各項分析，讓設計的讀寫頭符合上述要求。論文後半部份探討光學讀寫頭應用在角度量測的可行性，針對目前結合於原子力顯微鏡的光學讀寫頭，進行光學系統重建與模擬，並利用由光偵測器得到的訊號，找出訊號與待測面偏移的關係。並針對另一類型讀寫頭，同樣進行光學系統重建跟模擬，找出光偵測器得到訊號與角度偏移關係，並與前一類型讀寫頭做比較。This thesis studies the design of dual-wavelength compatible pickup head and the new application of pickup head applied in angular measurement. In the first part, a design of dual-wavelength compatible pickup head is demonstrated. By using two cubic beam splitters, the optical path length of DVD systems is aligned to that of the CD system. This design would simplify the alignment and arise the optical quality. Also by combined on silicon optical bench, the pickup head can be compatized. The wavefront error, tolerance and operation demand of the pickup head will be analyzed. In the later part of the thesis, the optical system of two different kinds of pickup head will be simulated. By defining two operating signal from photodetectors, the relationship between signal and tilt angle will be studied. Besides, one of the two simulated pickup heads is that applied in atomic force microscope while another one is simulated to find out the difference.
