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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/7016


    Title: 紅外波段高品質因素導波共振濾波器;Study on High Quality-Factor Guided-Mode Resonance Filters in Infrared Region
    Authors: 鄭中瑋;Chung-Wei Cheng
    Contributors: 光電科學研究所
    Keywords: 濾波器;品質因素;窄頻;波導;waveguide;GMR;filter;quality factor
    Date: 2008-07-09
    Issue Date: 2009-09-22 10:34:54 (UTC+8)
    Publisher: 國立中央大學圖書館
    Abstract: 本篇論文裡,相較於傳統光學濾波器是以多層薄膜堆疊的方式濾波,我們想利用導波模態共振濾波器這種簡單結構的濾波器。希望未來能應用於雷射共振腔裡的高反射鏡,使得出光的雷射為一個很純和指向性高的波長。所以我們理論設計的濾波器,其頻譜特性的目標為:高品質因素,故共振線寬能小於0.1nm;提高雜訊比,側帶高穿透率區域能大於700nm;最大穿透率能超過90%。而共振波長則以紅外波段為主。 我們提出的結構分別為:波導和光柵材料選擇SiNx,低被覆層為二氧化矽。先利用波導理論設計出波導厚度與特徵模態,爾後利用相位匹配得到光柵的週期,接著引入等效介質理論觀察側帶的穿透率。最後經過製程的容忍度分析,並實際製作出設計的導波模態共振濾波器,對模擬進行比對和驗證。 設計出的導波模態共振濾波器,在TE和TM模態下會有不同的結構參數。在光柵厚度為30nm下:針對TE模態,共振波長在1550.4nm,共振線寬為0.1nm,側帶高穿透率區域為680.8nm,品質因素為15504,最大穿透率為0.93。而TM模態,共振波長在1549.9nm,共振線寬為0.011nm,側帶高穿透率區域為733.76nm,品質因素為140902,最大穿透率為0.926。成功設計出符合我們目標的導波模態共振濾波器。 製程則以TE模態為例,實地量測後共振波長在1.58μm,共振線寬為0.92nm,側帶高穿透率區域為415nnm,品質因素為1718,最大穿透率約為0.94,這與將結構參數代入模擬計算得到的頻譜特性大致吻合。至此,我們成功的實際製作出滿足我們設定目標的導波模態共振波器。In this letter, the two-layer ultranarrow bandstop guided-mode resonance filter with a flattened sideband within a wide spectral range is implemented by using the combination of a subwavelength grating, a waveguide layer with multiple guided modes, and a lower cladding layer with a quarter-wave thickness. The proposed filter based on a free-standing silicon nitride membrane suspended on a silicon substrate is realized by using the anisotropic wet etching to remove the substrate beneath the silicon nitride layer. Both of grating and waveguide structures are fabricated simultaneously on a silicon nitride membrane. Moreover, the silicon dioxide membrane playing a role on modifying the spectral response of proposed GMR filter is deposited beneath the free-standing silicon nitride layer. The incident light is TE mode and the thickness of grating is 30nm. The resonance wavelength of proposed band-stop filter is controlled at 1550.4nm with a linewidth (FWHM) less than 0.1 nm. The improved spectral performance including the sideband can be extended to be nm with the maximum transmittance greater than 93%. The quality factor is 15504. However, the incident light is TM mode and the thickness of grating is 30nm. The resonance wavelength of proposed band-stop filter is controlled at 1549.9nm with a linewidth (FWHM) less than 0.011 nm. The improved spectral performance including the sideband can be extended to be nm with the maximum transmittance greater than 93%. The quality factor is 140902.
    Appears in Collections:[光電科學研究所] 博碩士論文

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