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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/70244

    Title: 多軸微電鍍機台控制之研究;The Research on Multiple Axis Stage for Localized Electro-Deposition Process
    Authors: 黃衍任
    Contributors: 機械工程學系
    Keywords: 機械工程;自動化工程(工)
    Date: 2016-03-29
    Issue Date: 2016-03-30 14:35:18 (UTC+8)
    Publisher: 科技部
    Abstract: 1995年中Madden等人提出局部微電鍍技術,成功製造出微米等級的鎳柱和彈簧等元件。此方法不需要光罩便可以製造出高細長比的微柱,所需要之設備簡單低廉,同時又可應用在各種材料上,因此受到廣大的重視。然而以往的微電鍍過程中,由於氣泡造成監控上的困難,大部份的學者是以固定速度移動陽極,或是以間歇式控制方法移動陽極 (即是當兩極相接觸後,再做提升的動作)。然而由於兩極接近時,突然增加的大電流會造成電解質的快速沈積,微柱因而產生節狀輪廓、表面粗糙、多孔隙不均勻等結果。為了改善間歇式控制方法的缺點,本實驗室在過去數;The “Localized Electro-Deposition” technique, proposed by Madden et.al. in 1995, was using a tiny anode to control the deposition of a small copper column. However, the following researches mainly focused on the material components or the anode placement.;研究期間:10408~10507
    Relation: 財團法人國家實驗研究院科技政策研究與資訊中心
    Appears in Collections:[機械工程學系] 研究計畫

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