English  |  正體中文  |  简体中文  |  Items with full text/Total items : 65275/65275 (100%)
Visitors : 20936131      Online Users : 240
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version


    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/7047


    Title: 單頻位移與傾角量測干涉儀;Quadrature Homodyne Displacement and Tilt Measuring Interferometer
    Authors: 蔡永勝;Yung-Sheng Tsai
    Contributors: 光電科學研究所
    Keywords: 位移量測;干涉儀;interferometer;displacement measurement
    Date: 2009-06-10
    Issue Date: 2009-09-22 10:35:49 (UTC+8)
    Publisher: 國立中央大學圖書館
    Abstract: 本論文描述一單頻雷射干涉儀,此干涉儀可同時量測待測物的鏡面位移量及傾角,並藉由一嶄新的非線性誤差補償方法,提高其位移量測精準度。 此干涉儀為一九十度相位差偵測系統架構,擁有更為簡易的架構以及更小之體積,不同以往的是只以單一雷射光束量測,達到同時量測位移與傾角的功能。 我們所發展的相位誤差補償方法,能有效消除干涉儀中的非線性特性,與傳統之橢圓擬合之方法相比,新的方法在訊號之相位變化較小及雜訊較大的情況之下,所求得之相位較舊的方法更為精確。 經實驗結果顯示,經過補償運算後,此干涉儀之非線性可以有效修正,可測得位移量測之準確度為0.6奈米。而用來感測待測鏡面之傾斜的四象限二極體的最小可解析之橫向位移量為2微米。This thesis describes a homodyne interferometer that could measure the displacement and tilt of test mirrors. The accuracy of displacement measurement could be enhanced by a novel nonlinearity compensation method. This interferometer adopts quadrature detection system with simpler setup and less system volume. It could measure not only the displacement as usual, but also the tilt motion of target by just a single laser beam. The phase error compensation method developed in the dissertation could correct nonlinearity efficiently. Compare with the conventional ellipse fitting method, the new method could acquire more accurate result than conventional one under less phase variation and noisy conditions. Experiment result demonstrates that after applying compensation, the nonlinearity could be compensated correctly. The precision of displacement measurement could achieve to 0.6nm, and the resolution of quadrant detector used for tilt measurement can reach to 2μm.
    Appears in Collections:[光電科學研究所] 博碩士論文

    Files in This Item:

    File SizeFormat
    0KbUnknown1103View/Open


    All items in NCUIR are protected by copyright, with all rights reserved.

    社群 sharing

    ::: Copyright National Central University. | 國立中央大學圖書館版權所有 | 收藏本站 | 設為首頁 | 最佳瀏覽畫面: 1024*768 | 建站日期:8-24-2009 :::
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback  - 隱私權政策聲明