本論文提出三種改良型光學讀取頭設計，取代傾斜45度平板分光鏡之光學讀取頭，應用於量測待測面有角度變化與縱向位移時之訊號模擬與分析，線性量測範圍可增加至8μm左右，且能有效減少角度變化對位移訊號的誤差，並提升不同方位角的可判讀性。在應用上能精準的得到待側面的表面輪廓，而結合光學讀取頭量測系統可用於測量原子力顯微鏡懸臂位移與角度變化，除了具有高解析度外，結構也十分精巧且價格低廉，未來更可以隨著讀取頭性能的進化而提升整個量測系統的精確性。The present papers proposed that three kinds of improvement optical pick-up head design, to substitution pick-up head with inclined of 45 degree plate beamsplitter, and apply to measure the tilt angles and the longitudinal displacements in the gauging testing surface, with the signal simulation and analysis. The linear gauging range can increase to about 8μm, and reduce the angle tilt effectively to the displacement signal, promotes the interpretability for different azimuth. The new design form can obtain in the application scans the side the surface profile, and be possible to unifies optical pick-up head gauging system into the atomic force microscope used in surveying the displacement and the tilt angle of the cantilever, besides has the fine resolution, the structure is also very exquisite, and the low in price, may promote the entire gauging system's accuracy in the future along with the performance evolution of the optical pick-up head.
