English  |  正體中文  |  简体中文  |  Items with full text/Total items : 66984/66984 (100%)
Visitors : 22676002      Online Users : 276
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version


    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/71600


    Title: 動態干涉儀應用於量測薄膜之光學常數;Optical constants of thin-film measurement by a vibration-insensitive interferometer
    Authors: 林育賢;Lin,Yu-Xen
    Contributors: 光電科學與工程學系
    Keywords: 干涉儀;四步相移;光學常數;Interferometer;phase shift;Optical constants
    Date: 2016-08-29
    Issue Date: 2016-10-13 13:19:48 (UTC+8)
    Publisher: 國立中央大學
    Abstract: 此篇論文研究是以架設偏振式Twyman–Green干涉儀,並搭配4D Technology公司出產的偏振像素攝影機,成功完成動態干涉量測系統之架設,量測功能可量測反射光譜與反射相位光譜,並透過窄帶濾光片選取所需的量測波長,得到多波長的量測資訊來分析。系統之反射光譜量測,其誤差為0.6 %,標準差為±0.172 %,反射相位光譜,其量測結果之誤差為1.26 %,標準差為±0.085 rad。
    動態干涉儀利用程式上的一些修正,可以減少對於元件設備的品質,像是在光源強度不均勻的情況下與元件自我干涉也能透過程式校正,還原待測物的量測結果。而動態干涉儀使用的相位延遲元件,可透過Intensity Lissajou Curves橢圓的傾角來調整1/4波長相位延遲片的快慢軸角度,以修正參考光與待測光可被極化為圓偏振光,從而減少橢圓極化光的產生,進而減少相位計算中fringe print-through誤差的產生。因此利用以建構好的演算程式,可以將品質所造成的光學現象加以修正與調整,得以降低動態干涉儀在光學元件上使用的成本。
    薄膜量測與橢圓偏振儀的量測結果作比較,將動態干涉儀所量測的反射光譜及反射相位光譜,透過simplex演算法擬合薄膜的厚度與折射率,即使在光學桌無防震狀態中量測,其量誤差皆小於1%。
    ;This article aims to set up a dynamic (vibration-insensitive) interferometry based on a polarized Twyman-Green interferometry with a polarization pixel camera produced 4D Technology Corporation.
    In this research, detailed analyses of the uniformity white-light source and self-interference effect illustrates how these improvements increase the accuracy of the thin-film measurement. Through intensity Lissajou curves, the phase shift of wave-plate can be corrected to reduce fringe print-through error in the phase calculation process. The dynamic interferometry is capable to measure reflection amplitude and phase for mutli-wavelength by selecting different narrow band-pass filter. The reflection spectrum error of Ta2O5 thin-film is 0.6 % ( 0.172 %) and the reflection phase error is 1.26 % (0.085 rad).
    An application of dynamic interferometry on transparent thin-film measurement was achieved. The measurements are compared with spectroscopic ellipsometry results (SOPRA GES 5), and for both film thickness and refractive index, the differences are within 1% of the ellipsometry measurement.
    Appears in Collections:[光電科學研究所] 博碩士論文

    Files in This Item:

    File Description SizeFormat
    index.html0KbHTML210View/Open


    All items in NCUIR are protected by copyright, with all rights reserved.

    社群 sharing

    ::: Copyright National Central University. | 國立中央大學圖書館版權所有 | 收藏本站 | 設為首頁 | 最佳瀏覽畫面: 1024*768 | 建站日期:8-24-2009 :::
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback  - 隱私權政策聲明