中大機構典藏-NCU Institutional Repository-提供博碩士論文、考古題、期刊論文、研究計畫等下載:Item 987654321/7163
English  |  正體中文  |  简体中文  |  全文筆數/總筆數 : 70588/70588 (100%)
造訪人次 : 23066968      線上人數 : 583
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
搜尋範圍 查詢小技巧:
  • 您可在西文檢索詞彙前後加上"雙引號",以獲取較精準的檢索結果
  • 若欲以作者姓名搜尋,建議至進階搜尋限定作者欄位,可獲得較完整資料
  • 進階搜尋


    請使用永久網址來引用或連結此文件: http://ir.lib.ncu.edu.tw/handle/987654321/7163


    題名: Mirau干涉共焦術應用於奈米階高試片量測之研究;Measurement of standards with nanometrology step height in the Mirau-interference Confocal Microscopy
    作者: 林世豪;Shin-Ho Lin
    貢獻者: 光電科學研究所碩士在職專班
    關鍵詞: Mirau干涉共焦術;干涉術;共焦顯微術;差動共焦顯微術;Differential Confocal Micros;Confocal Microscopy
    日期: 2007-07-02
    上傳時間: 2009-09-22 10:51:04 (UTC+8)
    出版者: 國立中央大學圖書館
    摘要: 本研究利用干涉效應結合差動共焦顯微術,稱為Mirau干涉共焦術,實現了高縱向解析度的表面階高量測。選用三種階高試片:170nm,50nm,29nm;由實驗量測結果證實,本系統大大提高光強度與縱向位移反應曲線的斜率到5.5/um,此數值優於差動共焦顯微術反應曲線的斜率1/um。並以干涉位移法做比對,來計算干涉條紋位移量,相互驗證量測差異量小於2nm內。更進一步去修正實驗方法,能夠從一張掃描光強圖立即得到縱向反應曲線,來做光強度–階高換算,比較傳統式共焦顯微術,真正達到快速掃描。 Study the effect of interference to combine differential confocal microscopy, called Mirau interference confocal microscopy, has realized the high vertical high quantity of surface steps of analyzing degree is examined. Select three kinds of steps for measure vertical-high: 170nm, 50nm, 29nm; Examine by experiment amount result verify system this raise intensity and vertical displacement react, number value this superior to differential confocal microscopy is it react 1 slope of curve / m to learn altogether. And do it than correctly by interfering the displacement law, to calculate and interfere the displacement amount of stripe, each other in the amount of difference examined of the proving amount is smaller than 2nm. Go still one step further to revise the experiment method, can scan the only strong picture to receive the vertical response curve from one immediately, is it make intensity to be steps high to convert to come, traditional type the confocal microscopy is learnt, really up to the fast scanning altogether.
    顯示於類別:[光電科學研究所碩士在職專班 ] 博碩士論文

    文件中的檔案:

    檔案 大小格式瀏覽次數


    在NCUIR中所有的資料項目都受到原著作權保護.

    社群 sharing

    ::: Copyright National Central University. | 國立中央大學圖書館版權所有 | 收藏本站 | 設為首頁 | 最佳瀏覽畫面: 1024*768 | 建站日期:8-24-2009 :::
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - 回饋  - 隱私權政策聲明