石墨烯(graphene)為近幾年備受矚目研究的材料之一。石墨烯，又名為單層石墨，由碳原子以sp2鍵結組合形成的六角形蜂窩狀結構其厚度為一個原子厚。其擁有良好的電性、極高穿透率以及高導熱性。 目前觀測石墨烯成長，其方法為石墨烯生長完之後，使用原子力顯微鏡(AFM)、掃描式電子顯微鏡(SEM)、穿透式電子顯微鏡(TEM)，以上述顯微鏡的暗場方式來觀察石墨烯晶粒，卻無法觀測石墨烯成長。 本研究主要目標在快速升溫系統(Rapid Thermal Process )上觀測石墨烯生長，使用長焦距光學顯微鏡做為觀測鏡頭，再以金屬網格驗證長焦距光學顯微鏡系統的暗場觀測模式使用上是可行的。為此目標，採用光學顯微鏡與長焦距光學顯微鏡相同倍率100倍下做比較分析。利用反射光方式在快速升溫系統的觀測孔觀測，機台溫度調節600度以下，皆可觀測未長滿石墨烯的暗場效果，研究結果快速升溫系統上使用長焦距光學顯微鏡的暗場觀測模式是可達到觀測石墨烯生長的。;Graphene is one of the materials that get the most attention in recent years. It is also known as monolayer graphite has hexagonal honeycomb structure of carbon atoms, the thickness of graphene is equal to an atom. It has good electrical properties, high transmittance and high thermal conductivity. Some research uses some instruments to observe the graphene, such as atomic force microscope (AFM), scanning electron microscope (SEM), and transmission electron microscope (TEM). But these instruments can’t observe the growing process of graphene. In order to observe the graphene growth in the rapid thermal system (Rapid Thermal Process), we use a long focal length optical microscope with dark field system as an observation. We compare the dark field result of optical microscope and the long focal length optical microscope with 100x in the temperature is near 600°C. It is successful to observe the graphene in the rapid thermal system.
