一般來說線切割機主要加工的對象為金屬，而在於加工石英玻璃方面，因其材料硬度較硬且脆的特性，使其不容易被加工處理，而電化學放電加工方式利用電弧放電時所產生的高溫熔融加工並以蝕刻輔助為其中一種加工方法。本論文採用液滴滴定法電化學放電線切割加工法來切割石英，而此方法在切割時需要保持穩定的電弧現象，故若加工用之銅線與石英玻璃間的距離不穩定則會造成切割不順利，精度無法達到所需要求。 本研究利用CCD觀察切割時銅線的位置，當在加工時若石英玻璃未順利移除，則會在進刀時壓迫到銅線極，迫使銅線彎曲並偏移，此時會立即退刀，並繼續加工。而實驗結果顯示，我們能夠將以進給速率1000μm/min順利切割，並在切割700μm以下的石英玻璃時可以將誤差降低在10μm以下，但在切割1000μm時，因為靠陽極太近，而造成放電頻率與強度增強且不夠穩定，導致控制效果變差，無法將誤差準確的控制在10μm以內。但比目前文獻中最佳切割速率350μm/min 加工時間縮短43%的時間，相對的也使用較少的電解液，不僅成功在精度上有較好的改善，在效率上也相較以前良好。 ;Generally, the machining targets of wire electrical discharge machines are metals. As for machining quartz glass, due to its higher scale of hardness and its brittleness, it is difficult to apply machining on this material. Electrochemical discharge machining is one of the machining processing ways which uses high temperature melting made from arc discharge and assists with etching. This thesis adopts wire electrochemical discharge machining (WECDM) with titrated electrolyte flow to process quartz glass. When operating with this method, it’s necessary to keep the stability of arc discharge phenomenon or the distance between the copper wire and the quartz glass cannot be kept. This will lead the unsuccessful cutting and the required accuracy cannot be reached. This study used camera image to observe wire′s position during processing. If the quartz glass was not successfully removed when machining, the wire polar would be oppressed when the wire touched to the material, and the wire would be bent. At this moment, the copper wire was withdrawn to proper distance, and the machining continued again. The experiment showed that the processing succeeded under the feed rate of 1000μm/min, and the error range could be reduced below 10μm when carving quartz glass was under 700μm. However, when machining depth over 1000μm, the frequency and intensity of current is too strong and unstable enough and led to worse controlling effect so that the error range could not be limited within 10μm. The result shows that this experiment reduced 43% machining time in comparison with the best operative rate 350μm/min among all the current documents. The accuracy was improved and the efficiency was better than before.
