電漿聚合系統在不同功率下製成聚吡咯薄膜之特性及微結構分析;Effects of Radio Frequency Power on the Microstructures and Proprties of Plasma Polymerized Polypyrrole Thin Films

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题名:	電漿聚合系統在不同功率下製成聚吡咯薄膜之特性及微結構分析;Effects of Radio Frequency Power on the Microstructures and Proprties of Plasma Polymerized Polypyrrole Thin Films
作者:	李泳德;Le,Yung-Te
贡献者:	機械工程學系
关键词:	電漿聚合系統;聚吡咯;plasma polymerized system;polypyrrole
日期:	2016-08-12
上传时间:	2016-10-13 14:55:20 (UTC+8)
出版者:	國立中央大學
摘要:	運用電漿製程技術將液態吡咯單體氣化並沉積在玻璃/矽基板形成聚吡咯薄膜，再藉由探討不同PF功率下之對結構變化組成的影響。透過OES偵測儀器得到電漿組成光譜以及其他特性檢測方式如下：使用Surface profiler測量平均膜厚；FTIR測量微觀結構的振動模式；UV-Vis光譜儀測量薄膜之光穿透率、反射率以及吸收率；水接觸角量測量表面親水性。根據物質特性分析後，了解到在越高瓦數情況下薄膜沉積速率越快。所有製程之薄膜皆為透明且由吡咯分子組成。並依據功率及流量不同之影響選擇一組製程參數以做為藥物釋放之實驗測試。將實驗藥物(地塞米松21-磷酸二鈉鹽)夾在聚吡咯薄膜及基板之間然後浸至去離子水中，結果指出隨著時間增加，藥物在水中的濃度也增加，並在45小時後達到飽和。;Polypyrrole films, deposited on glass or silicon substrate by plasma polymerization under different radio frequency power and pyrrole flow rates, were investigated in this study. The plasma condition was monitored by optical emission spectrometer and films’ properties and functions are assessed by following instruments: Surface profiler for the average thickness and deposition rate; Fourier transform infrared spectroscopy for the microstructural vibration modes; optical spectrometer for transmittance, reflectance and absorbance; and contact angel for wettability. From material characterizations, we find that the thicker films deposited faster if power is increased. All deposited films are transparent and made of fragmented pyrrole such as C-N, C=N, C=C and N-H whereas the main part of pyrrole C=C=C, N=C=C bonds are relatively weak, which implies most carbon ring structures were fractured by plasma. After material characterizations, a set of optimal process parameters, i.e. power and flow rate are chosen to deposit the pyrrole film as a diffusion barrier for chemical release. The chemical, dexamethasone 21-phosphate disodium salt, sandwiched between polypyrrole and substrate is immersed in de-ionized water over time. The concentration of released DPS in water via deposited film was found to increase with time but saturates after 48 hours.
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