本研究將奈微米球體單層鋪排技術應用在鈣鈦礦太陽能電池上，首先透過時域有限分差法(FDTD)進行理想粗化基板的二維光學模擬，將光線於不同角度入射的模擬結果進行統計，發現粗化基板會隨著週期越大以及光線在高角度入射時擁有越好的效果。接著進行粗化基板的製作，先以電漿輔助化學氣相沉積在FTO基板玻璃面鍍上一層二氧化矽薄膜，隨後於薄膜上分別以奈微米球體單層鋪排技術鋪排1000、500、220奈米的二氧化矽球體作為蝕刻遮罩，再透過反應式離子蝕刻將球體完整蝕刻得到粗化基板，並將製作出的粗化基板進行積分球穿透率量測，其結果與模擬結果相比較發現擁有相近的趨勢。最後將基板實際應用在鈣鈦礦太陽能電池製作，在電池製作過中是利用鈣鈦礦太陽能電池的一段製程(one-step)，得出光線於垂直入射時，平面基板對照組之Jsc、Voc、FF、PCE平均值分別為20 mA/cm2、0.95 V、65%、12.35%，經過不同角度所量測到的效率值發現，粗化基板電池皆在光線於高角度入射時會有較好的光捕捉效果。整理各角度的量測結果並積分曲線下面積後進行比對，得知週期為1000奈米的粗化基板擁有最好的效果，增幅為4.2%。由此可見利用奈微米球體鋪排技術進行蝕刻得到的粗化基板可以有效的在高角度狀態下提升光線的抗反射與牽制能力，有助於減少能源上的損失，在製作過程中符合快速便捷、永續經營的概念。;In this study, we use the self-assembly method applied on perovskite solar cell. First, we employed the two-dimensional Finite-Difference-Time-Domain (FDTD) method to evaluate the enhancement phenomenon of the nano-patterned substrate with different angles of incidence. Due to the result of simulation, we found that the transmittance will be grater while light is inserted at a high angle and the substrate with larger structure period has better enhancement. Next, to produce nano-patterned substrate for perovskite solar cells, a layer of silicon dioxide film was deposited on to the glass surface of fluorine doped tin oxide substrate by the plasma enhanced chemical vapor deposition process. After the deposition process, we incorporated with the self-assembly method to arrange three different sizes of silica spheres 1000, 500, 220nm onto the silicon dioxide layer and used the reactive ion etching process to obtain patterned substrates. The measurements of transmittance by integrate sphere was completed after the fabrication of patterned substrates and we got a similar tendency with the FDTD result. During the fabrication of a solar cell, we applied the one-step method to obtain mesoscopic heterojunction perovskite solar cell with Jsc 20mA/cm2, Voc 0.95V, FF 65%, PCE 12.35% in average. In comparison with none-patterned substrates, the power conversion efficiency of the patterned substrate with a period of 1000nm is increased 4.2% when we integrate the surface under the curve from -80 to 80 degree of light incident. Thus, the patterned substrates via self-assembly method can suppress the reflection phenomenon and effectively improve the light harvest of the device at high angles of incidence. It can help to reduce optical loss and provide a faster and easier method in fabrication.
