有機金屬化學氣相沉積法(MOCVD)是一種製造化合物半導體單晶薄膜的製程技術，為提高沉積薄膜之生長均勻性，製程設備中多會使用旋轉主軸。而主軸除必須在高速、高溫與真空環境中運轉，並須確保主軸與晶圓載盤的穩定度。因此需要有完備的冷卻系統以增強散熱能力，確保零組件之壽命；同時主軸相關設計亦必須能降低載盤產生的軸向偏擺與振動，以避免對盤面流場與光學量測造成不良影響。 本論文之主旨係完成新版鉬合金主軸設計，並完成有限元素熱傳分析，以及透過實驗驗證所設計主軸之相關性能與有限元素分析模型的精確度。本研究共完成兩種主軸，分別安裝於兩個MOCVD實驗腔體。為增加流道冷卻效果，本研究主軸冷卻流道中之軸承外部流道採用螺旋式流道設計，同時亦完成軸心冷卻的新式旋轉接頭設計，確保高速旋轉下冷卻水不會洩漏。為掌握主軸熱傳狀況，以確保軸承與磁流體軸封不會因承受來自加熱器高溫而失效，本研究使用有限元素分析軟體以流固耦合分析主軸各流道冷卻性能，並與實驗結果做驗證。比較結果顯示，分析與實驗結果最大差值約在7%左右，顯示分析模型具有相當可信度。 在研究中亦完成主軸高速旋轉下石墨載盤軸向偏擺與主軸振動量測，所得之數值結果皆在合理範圍內。另一方面為了進一步降低載盤的軸向偏擺，本研究將提出以陀螺效應為概念的載盤夾持機構，並製作初步的原型，再以實驗進行驗證；結果顯示載盤在高速旋轉下，可自主達到平衡的旋轉狀態，驗證構想之可行性。 ;Metal-organic Chemical Vapor Deposition (MOCVD) is a chemical vapor deposition method used for production of single or polycrystalline thin films. In order to improve the growth uniformity of thin film, a robust rotating spindle of the process equipment is essential. The spindle must not only work with high revolution speed and in the high temperature and vacuum environment, but also ensure the stability of the spindle and wafer susceptor. Therefore, a suitable cooling system is required to enhance heat dissipation and life time of the components. Meanwhile, the related design of the spindle must also be able to reduce the axial deflection and vibration of the susceptor to prevent the adverse effects on the flow field over the susceptor surface and the optical measurement of the thin film. The main purpose of the paper is to design a new version of the spindle, to establish a heat transfer analysis FEM model and to conduct an experimental analysis for validation of the FEM model and the performance of the spindle. The spindles are installed in two separate MOCVD experiment chambers. The external of the bearing cooling channel is improved by using a spiral cooling channel to increase the cooling effect. A new rotary joint for the spindle cooling is also designed to ensure sealing of the cooling water during the rotation of the spindle at high speeds. In order to to ensure the cooling of the bearings and magnetic rotary feedthrough against overheating and failure due to the intense heat of the heater, the heat transfer conditions of the spindle must be obtained. In this study, finite element analysis software is used to analyze the cooling performance of each channel of the spindle by using fluid-solid interaction simulation. The analysis results are also compared with the experiment results. The results show that the maximum difference is about 7%, which shows a good agreement of the FEM model with the experiment. The axial deflection of the graphite susceptor and the vibration of the spindle measurements under the high-speed rotation are also measured with all result values within the reasonable range. On the other hand, in order to reduce the axial deflection of the susceptor furthermore, new concepts for susceptor holder mechanism are also proposed in the study by using the Gyroscopic effect. The feasibility of the concept is validated by a running experiment with two prototypes. The results shows that the susceptor can be self-balanced under high rotation speed.
