利用氣相沉積方法將鈷奈米團簇成長在氧化鋁薄膜Al2O3/NiAl(100)上，我們發現Co/Al2O3/NiAl(100)模型中，鈷奈米團簇具有特定的尺寸大小分佈，且位置會依有序氧化鋁薄膜區域的突出結構排列。而利用加熱方法改變氧化鋁薄膜及表面突出結構的形貌，可進一步掌控鈷奈米團簇在氧化薄膜上的排列。在對此模型中鈷奈米團簇的熱穩定性做研究，加熱到７５０ K情況下，鈷奈米團簇仍能維持特定大小及排列的特性。此外，實驗中主要觀測儀器掃描穿隧電子顯微鏡（scanning tunneling microscopy, STM）的探針，被發現有機會移動模型中的鈷奈米團簇，因此提供一種新的可能做為操控鈷奈米團簇。 論文中首先對相關的奈米團簇研究做簡介，並介紹成長於鎳鋁合金上的氧化鋁薄膜其結構及特性。再來將說明實驗的儀器及流程。最後會對各實驗流程結果做分析及討論。 We observe uniform and sizable Co nanoclustres grown by vapour deposition are highly aligned by protrusion structures of the crystalline Al2O3, which are grown on NiAl(100) substrate. Through thermal treatments, we can control the crystalline Al2O3 films and consequently pattern the Co nanoclusters into quasi-lattice or linear, T-shape and rectangular cluster chains with various lengths as well as widths, from single values to multiples of the cluster’s diameter. Thermal stability tests show the patterns are robust as they are sustained even when the Co nanoclusters are flashed to 750 K. Moreover, the patterns can be further refined by using STM tips. The results imply potential applications in both fundamental and applied researches for electronic and magnetic nanodevices as well as catalysis. Experiments were done in an UHV chamber with a base pressure lower than 10-9 torr and results were displayed by scanning tunneling microscopy (STM). In this thesis, we will give a literature survey first to show previous experiments about the nanoclusters. It also shows the known knowledge of NiAl(100) and Al2O3 films. Then, experimental equipments and experimental procedure will be presented. Finally, we will discuss the experimental results which include each step of the experiments displayed by STM.