| 摘要: | 本研究提出適用於準直光源的演算技術，因使用點光源近似的解不適用於非遠場條件，進而使用一種單光源光/輻射照度演算技術，利用單光源在目標平面上的輻射/光照度分布以最小平方法進行函數化成為一個光分布函數，光分布函數可以計算目標平面上區域位置的輻射/光照度値，並且光分布函數也針對不同目標平面之距離進行演算，使得光分布函數可達到距離目標平面之區域結果最佳化。
使用演算法之結果可吻合模擬之結果，能夠快速的知道各個距離目標平面D和光源直徑S的比率D/S Ratio(以下簡稱距離直徑比D/S Ratio)的光照度分布函數，再依此函數進行多光源演算法，可得到完善的區域解。本研究針對UV-LED準直多光源進行主要之探討，因UV-LED準直多光源使用在曝光機上會需要非常嚴苛的環境，後以白光LED準直多光源進行實際實驗驗證，以下為本研究之最佳解。
使用UV-LED準直多光源進行驗證後，在光源顆數單排十顆、在被照物觀測點區域範圍L=320mm、距離直徑比D/S Ratio=7下，可以發現在演算法最佳照度解，可以得到最佳均勻度94.1%、最佳均勻度之光源與光源之間距d=35mm，並且利用模擬進行驗證，模擬在相同被照物觀測點區域範圍(L)、距離直徑比D/S Ratio與光源與光源之間距(d)下，得到均勻度為94.9%，與演算結果差異極小。
後進行白光LED準直多光源來進行驗證，可以發現在單排五顆，在被照物觀測點區域範圍L=180mm、距離直徑比D/S Ratio=10的狀態下，演算得到均勻度95.2%，並且利用演算法之結果進行驗證，模擬驗證可得均勻度為94.2%，再著利用演算法之結果進行實驗驗證，將實際打樣出之透鏡進行排列，依照演算法之最加均勻度之光源與光源之間距，實驗結果均勻度為90.2%。
;In this thesis, we will propose a method of optical field calculation to accurately calculate for collimated light source. The solution using the point source approximation method is not suitable for non-far-field conditions. Therefore, this provides an algorithm to a single light source of Illuminance and irradiance distribution. A light spread function (LSF) that is composed of a two-term Gaussian function from the nonlinear least squares method will be utilized to fit the illuminance and irradiance distribution of each extended source on the target plane. The LSF can calculate the illuminance and irradiance distribution at the regional position on the target plane, and the LSF also calculates the distance for different target planes so that the LSF can reach the regional result optimization from the target plane.
A result of using the algorithm, it is possible to quickly know the LSF of each ratio from the target plane (D) and the light source diameter (S), we call D/S Ratio, and then perform the multi-light source algorithm , this can get a more complete regional results.The UV-LED multi-light source of collimation for the main discussion, because the UV-LED multi-light source of collimation used in the exposure machine will need a very harsh environment, after the white LED multi-light source of collimation for practical experimental verification, the following the best solution of the thesis.
The UV-LED multi-light source of collimation is used, the number of light sources is 10 stars of Single row, and the range of the observation point L = 320mm and the D / S Ratio = 7, we can find that the maximum. The best uniformity can be obtained by the best degree of uniformity of 94.1%. The optimum uniformity of the distance between the light source and the light source d = 35mm, and under the same conditions, the optical simulation software to obtain uniformity of 94.9%, and the results of the calculation is very small difference.
The white LED multi-light source of collimation is used, the number of light sources is 5 stars of Single row, and the range of the observation point L = 180mm and the D / S Ratio = 10, we can find that the maximum. The best uniformity can be obtained by the best degree of uniformity of 95.2%, and under the same conditions, the optical simulation software to obtain uniformity of 94.2%, the experimental results to obtain uniformity of 90.2%. |
