隨著科技快速進步，使得全球對環境與能源日益重視，依賴程度也與日俱增；然而我們所生活的社會正面臨著污染、化石燃料不足、全球暖化等環境與能源危機。為了克服這些問題，迫切需要清潔和可再生能源材料及其裝置。超級電容器不僅擁有優異的功率密度與儲電能力，其亦能提供高速充放電速率及長的循環壽命，且操作安全、具環境友好性，其中微型超級電容器由於可進一步與MEMS和CMOS集成，近年來引起了廣泛的研究興趣。 本研究以濺鍍之MoOx薄膜為活性物質製備指叉式微型固態超級電容器，探討具有不同指叉結構組態(指叉總數、間隙、寬度及長度)的平面微型超級電容器，其幾何構型對電化學性質的影響。此外，本研究引入了基於MoOx/Ag多層薄膜結構之指叉式微型固態超級電容器的新概念。電化學交流阻抗分析證實了由於銀薄膜的摻入，MoOx金屬氧化物之低導電率的缺陷得到有效的改善，使得其體積比電容與能量和功率密度遠高於基於MoOx單層薄膜結構的指叉式微型固態超級電容器，且其體積比電容隨著銀摻入的量增而逐漸增加；但加入過量的銀，比電容在連續充放電後的保持率並不會隨此增加，每層銀厚度為1.5 nm的MoOx/Ag多層薄膜結構經過10000次之大數量的循環次數之後，表現出最優異的循環穩定性和最高的體積比電容。 活性材料的高導電性對基於金屬氧化物的擬電容實現高的比電容以及功率和能量密度至關重要。本研究基於單層MoOx與多層MoOx/Ag薄膜結構之指叉式微型固態超級電容器皆展現相當優異的電化學性能，其結果表明所使用之方法和設計對微型儲能系統的應用表現出巨大的前景。;With the scientific and technological advancements, the society which we live is facing the energy and environmental related problems such as pollution, deficiency of fossil fuels, and global warming. In order to resolve these issues, green-energy and renewable materials as well as their devices are demanded. Supercapacitors (SCs) exhibit high specific capacitance and power density, fast charge-discharge rate, and long cycle life. In addition, they are safe in operation and environmental friendly. Recently, micro-supercapacitors (MSCs) have attracted much interests since they can be further integrated into MEMS and CMOS. In this work, we introduce planar interdigitated electrode structure based on MoOx thin film electrode materials, which can be further fabricated to on-chip and all-solid-state MSC. This study investigated the influence of the geometric configuration of planar interdigitated MSCs with different interdigitated patterns (varying the interspace, width, length and number of interdigitated fingers) on their electrochemical properties. Furthermore, we introduce a new concept to fabricate MSC based on MoOx/Ag multilayers, with which the volumetric capacitance is much higher than that of the bare MoOx-based MSC. MoOx/Ag multilayer MSC also demonstrates higher energy density and power density. Electrochemical impedance spectroscopy (EIS) confirmed that the electrical conductivity of MoOx was significantly improved due to the incorporation of silver. The corresponding volumetric capacitance increases as the the silver thickness increases. But with the excess silver, the capacitance retention rate was found to be degraded. MoOx/Ag multilayers MSC with a thickness of 1.5 nm for each Ag layer exhibits most excellent cycle stability and highest volumetric capacitance after a large cycling number of 10000 times. This work indicates that high electronic conductivity of the electrode material is crucial to achieving high specific capacity as well as power and energy density for pseudocapacitors. These excellent electrochemical performance of results suggest that our method and design show great promise for applications in integrated energy storage for all solid-state microsystems technologies.
