摘要(中) 在高科技生產廠房，由於製程的進步及晶圓製程線徑的微小化，對於生產環境的需求已從要求粒狀污染物進而要求氣態分子污染物(Airborne Molecular Contaminant, AMC)的濃度標準。對潔淨室外氣空調箱(Make-up Air Unit, MAU)利用空氣洗滌器(Air Washer)加濕方式，同時去除大氣中的氣態分子污染物中二氧化硫(SO2)、氨(NH3)，藉由水對於二氧化硫、氨等氣體為良好的溶劑，進而提升此類污染物的去除效率。目前應用在加濕上使用的空氣洗滌器(Air Washer)大都採用噴淋水洗的方式，將其搭配填充型洗滌塔，便可將加濕器有效運用於去除AMC，所以填充型洗滌塔的填充材料型式，便為影響去除效率的一項重要參數。 本研究探討洗滌塔的填充材料分別為立體結構型填充物及SUS304交叉絲網，其於不同的水質條件下，對二氧化硫(SO2)及氨(NH3)的去除效率，實驗發現：SUS304交叉絲網循環水水質控制在30 μS/cm時對於二氧化硫及氨的最高去除效率分別為68%及93%，出口濃度可維持在2 μg/m3以下。將循環水水質控制在10 μS/cm時，對於二氧化硫及氨的最高去除效率可分別提昇至79%及97%。當填充材料為立體結構型填充材料時，其填充層厚度為SUS304交叉絲網的三分之一，即可達到與SUS304交叉絲網相同的去除效率，所以使用立體結構型填充材料，可縮短空氣洗滌器(Air Washer)的建置空間，進而增加生產機台的設置，有效提升企業的的競爭力及獲利。 ;摘要(英) Airborne molecular contamination (AMC) is chemical contamination in the form of vapors or aerosols, that and has a detrimental effect on a product or a process. The main sources of AMC in cleanrooms are the ambient environments, process chemicals, emissions from tools emissions, and construction materials. With the increased production of semiconductor devices in the sub-100 nm range, a Abating AMC has become a crucial element of cleanroom management as the production phase of semiconductor devices marches deep into sub-100-nm range. Make-up air units (MAUs) are air- handling units that provide purified outside air to cleanrooms. An The air washer of in an MAU is a piece of equipment that is designed to remove contamination by scrubbing the outside air that moves through it. Internal packing in the packed a tower of air washers provides a large wetted contact surface area to induce intimate contact between for the contaminated gas and the scrubbing liquid. This study evaluated the removal performance of SO2 and NH3 by in a tower of packing of air washers with that used SUS304 wire netting and structured-interlaced monofilament as internal packing material. It is found The results showed that one third a tower packeding with depth of structured- interlaced monofilament can achieve the same removal performance as a tower packed with SUS304 wire netting, but at one-third the packing depth. This is due to because the packing material of used in the structured-interlaced monofilament could facilitated the breakup of the liquid phase and created the maximum surface area for mass transfer with in the vapor phase. Using structured-interlaced monofilament packing material, would considerably reduce the volume of the air washer could be reduced largely, and thereby actuvate increasing the working space of the factory.
