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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/75135

    Title: 整合填充型水洗技術於潔淨室外氣空調箱 以去除酸鹼氣態分子污染物之研究;Application of Air washer of Make-up Air Units to Remove Acidic and Basic Gaseous Melecular Pollutants
    Authors: 徐文瑞;Hsu, Wen-Jui
    Contributors: 環境工程研究所在職專班
    Keywords: 氣態分子污染物;外氣空調箱;空氣洗滌器;洗滌塔填充材;AMC;MAU;Air Washer;packing material
    Date: 2017-07-20
    Issue Date: 2017-10-27 16:22:53 (UTC+8)
    Publisher: 國立中央大學
    Abstract: 摘要(中)
    在高科技生產廠房,由於製程的進步及晶圓製程線徑的微小化,對於生產環境的需求已從要求粒狀污染物進而要求氣態分子污染物(Airborne Molecular Contaminant, AMC)的濃度標準。對潔淨室外氣空調箱(Make-up Air Unit, MAU)利用空氣洗滌器(Air Washer)加濕方式,同時去除大氣中的氣態分子污染物中二氧化硫(SO2)、氨(NH3),藉由水對於二氧化硫、氨等氣體為良好的溶劑,進而提升此類污染物的去除效率。目前應用在加濕上使用的空氣洗滌器(Air Washer)大都採用噴淋水洗的方式,將其搭配填充型洗滌塔,便可將加濕器有效運用於去除AMC,所以填充型洗滌塔的填充材料型式,便為影響去除效率的一項重要參數。
    本研究探討洗滌塔的填充材料分別為立體結構型填充物及SUS304交叉絲網,其於不同的水質條件下,對二氧化硫(SO2)及氨(NH3)的去除效率,實驗發現:SUS304交叉絲網循環水水質控制在30 μS/cm時對於二氧化硫及氨的最高去除效率分別為68%及93%,出口濃度可維持在2 μg/m3以下。將循環水水質控制在10 μS/cm時,對於二氧化硫及氨的最高去除效率可分別提昇至79%及97%。當填充材料為立體結構型填充材料時,其填充層厚度為SUS304交叉絲網的三分之一,即可達到與SUS304交叉絲網相同的去除效率,所以使用立體結構型填充材料,可縮短空氣洗滌器(Air Washer)的建置空間,進而增加生產機台的設置,有效提升企業的的競爭力及獲利。
    Airborne molecular contamination (AMC) is chemical contamination in the form of vapors or aerosols, that and has a detrimental effect on a product or a process. The main sources of AMC in cleanrooms are the ambient environments, process chemicals, emissions from tools emissions, and construction materials. With the increased production of semiconductor devices in the sub-100 nm range, a Abating AMC has become a crucial element of cleanroom management as the production phase of semiconductor devices marches deep into sub-100-nm range. Make-up air units (MAUs) are air- handling units that provide purified outside air to cleanrooms. An The air washer of in an MAU is a piece of equipment that is designed to remove contamination by scrubbing the outside air that moves through it. Internal packing in the packed a tower of air washers provides a large wetted contact surface area to induce intimate contact between for the contaminated gas and the scrubbing liquid.
    This study evaluated the removal performance of SO2 and NH3 by in a tower of packing of air washers with that used SUS304 wire netting and structured-interlaced monofilament as internal packing material. It is found The results showed that one third a tower packeding with depth of structured- interlaced monofilament can achieve the same removal performance as a tower packed with SUS304 wire netting, but at one-third the packing depth. This is due to because the packing material of used in the structured-interlaced monofilament could facilitated the breakup of the liquid phase and created the maximum surface area for mass transfer with in the vapor phase. Using structured-interlaced monofilament packing material, would considerably reduce the volume of the air washer could be reduced largely, and thereby actuvate increasing the working space of the factory.
    Appears in Collections:[環境工程研究所碩士在職專班] 博碩士論文

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