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    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/75177

    Title: 溫度效應對矽基板上的氮化鎵有機金屬氣相沉積法之探討;Study of temperature effect on the growth of GaN-on-Si with metal-organic chemical vapor deposition
    Authors: 傅國榮;Fu, Guo-Rong
    Contributors: 光電科學與工程學系
    Keywords: 氮化鎵;矽基板;有機金屬氣相沉積儀;GaN;Silicon substrate;MOCVD
    Date: 2017-07-11
    Issue Date: 2017-10-27 17:17:32 (UTC+8)
    Publisher: 國立中央大學
    Abstract: 近年來,氮化鎵成長於矽基板對於製作光電半導體元件是個非常重要的技術,然而氮化鎵成長於矽基板面臨了幾個重大的問題,其一為氮化鎵跟矽基板的晶格差異過大,導致磊晶完成後氮化鎵內部會含有大量的缺陷,而這些缺陷對高電子遷移率電晶體來說會降低電子在二維電子氣內的遷移率,此外缺陷也會降低發光二極體及太陽能電池的效率;其二為氮化鎵跟矽基板之間的熱膨脹係數差異過大,在磊晶過程升降溫中會導致基板彎曲最終氮化鎵會發生龜裂,影響之後原件的製程。
    ;In recent years, the growth of GaN-on-silicon has attracted much research interests because of its low cost. However, some issues remain to be solved: (1) There is a large lattice mismatch between GaN and silicon, and this leads to high density of crystal defects, reducing the electron mobility in transistors. In addition, the defects also hamper the quantum efficiencies of LEDs and solar cells; (2) The huge mismatch in thermal expansion mismatch between the two materials even causes cracks, making epilayers unsuitable for device fabrication.
    To address the issues, we adopted low-temperature AlN as the nucleation layer for the growth of GaN-on-Si. The low-temperature AlN not only provides the nucleation seeds for the subsequent GaN growth, but also prevent the thermo-decomposition of the impurities formed on the reactor wall. The low-temperature AlN buffer is followed by a AlN/AlGaN layer grown at varied temperatures to release the lattice strain. We found the substrate temperature of the AlN/AlGaN strain-engineering layer plays a decisive role in the surface morphology of subsequent GaN layer. Details characterization results and discussions will be presented.
    Appears in Collections:[光電科學研究所] 博碩士論文

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