近幾年由於微機電製程技術的迅速發展，導致感測器、制動器等元件所需的消耗功率降低許多，為了將元件最小化，我們發展出微型發電機作為傳統電池的替代方案，其中以立體導電結構以及振動所引起的電磁感應來作為微型發電機的發電原理。此研究利用自動點膠機配上三軸移動平台將具有導電性的銀膠在一透過微機電製程所加工過的懸臂樑結構上製作出多層線圈，將此懸臂樑搭配釹鐵硼磁鐵放置在一振盪器上，而懸臂樑與釹鐵硼磁鐵所造成的相對位移會進而產生發電，來達成發電機的運作原理。本實驗比對了一至三層線圈的發電機來探討單層與多層線圈的量測結果。由實驗數據中可發現單層線圈具有較高輸出，較低頻寬，而多層線圈有較低輸出，較高頻寬的現象。;Due to the rapid development in microelectromechanical systems (MEMS), the power consumptions of sensors and actuators decrease in a large scale. In order to minimize the size of the devices, we present a micro energy harvester to replace the traditional batteries which have the disadvantage of size in general. In this case, 3-dimensional structure under vibrations causing the electromagnetic induction to generate electricity is selected to be the principle of the energy harvesting. This study proposes a fabrication on the silicon wafer process for the cantilever with multi-layer conductive coils by an automatic dispensing robot stacking above the cantilever. The cantilever is placed on a shaker which contributes a relative displacement with a Neodymium magnet. We compare the performances of 1 to 3 layers of coils on the harvesters. From the experimental results, we found that the single-layer coil harvesters have high output power but narrow bandwidth. On the other hand, multi-layer coil harvesters have lower output power but wider bandwidth.
