English  |  正體中文  |  简体中文  |  Items with full text/Total items : 69937/69937 (100%)
Visitors : 23359704      Online Users : 591
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version

    Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/79626

    Title: 應用隨機性與均勻性檢測輔助增強晶圓圖系統性錯誤之解析;Applications of Randomness and Homogeneity Test to Enhance the Systematic Error Resolution for Wafer Map Analysis
    Authors: 曾聖翔;Tseng, Sheng-Hsiang
    Contributors: 電機工程學系
    Keywords: 晶圓圖;隨機性錯誤;系統性錯誤;良率;Wafer map;Yield;Random errors;Systematic errors
    Date: 2019-03-28
    Issue Date: 2019-04-02 15:08:35 (UTC+8)
    Publisher: 國立中央大學
    Abstract: 本篇論文為解決系統性錯誤在尺寸小的晶圓中判別力不足的問題,在九種系統性錯誤中針對其中六種有特別症狀的錯誤進行分割分析,分別分割成該特徵圖形之晶圓圖,並使用隨機性與均質性檢測來檢測分割後的晶圓以增強該特徵之系統性錯誤,藉由分割前與分割後的晶圓圖比較來觀察其判別效果。
    藉由分割成各種不同的形狀後,我們藉由隨機性與均質性檢測,來實際檢測分割後的晶圓圖,在隨機性檢測上使用假設檢定的方式,在對立假設上假設是「是否是過度群聚」,檢定虛無假設使用單尾檢定,所以檢查B-score > 1.64,同樣,如果對立假設是「是否是反群聚」,檢定虛無假設使用單尾檢定,所以檢查B-score <- 1.64,如果對立假設是「是否是非隨機」,檢定虛無假設使用雙尾檢定,所以檢查B-score > 1.96 ,之後,即可畫出閘門圖(Gateway Diagram),將其分成五區。在均質性檢測則使用良率參數,針對切割後的良率相差大於一定閥值,來協助判別其晶圓圖錯誤。
    ;The systematic error is hard to distinguish in small diesize wafer. In order to solve the problem, this paper analyze six kinds of symptomatic failure types among the nine kinds of systematic errors. Each of failure types have been cut into different shapes. The randomness and homogeneity test are used to enhance the detection resolution of systematic error after doing wafer partition. Then, we observe the resolution ratio in systematic error after doing partition.
    After cutting into various shapes, we use the randomness and homogeneity test to test each wafer. In randomness test, the hypothesis test is used. If the alternative hypothesis is over-cluster, the null hypothesis is determined to use a one-tailed test. And, we will check whether B-Score is higher than the critical value 1.64 or not. If the alternative hypothesis is non-random, the null hypothesis is determined to use two-tailed tests. Then, check the absolute value of B-Score is higher than 1.96 or not. Finally, you can draw a gateway diagram and divide it into five blocks. In the homogeneity test, we choose the yield parameter to support us to analyze wafer. If the yield difference of wafer is higher than the threshold after doing partition, the wafer may have systematic error.
    Different partition method is used to distinguish different failure types. For example, we change the radius of the donut partition wafer to detect the edge-ring failure type and the defect position. Then, the applications of randomness and homogeneity test is used for the wafer after doing partition. Finally, the results of the test are combined to enhance the systematic errors resolution, so as to improve the yield and reduce costs.
    Appears in Collections:[電機工程研究所] 博碩士論文

    Files in This Item:

    File Description SizeFormat

    All items in NCUIR are protected by copyright, with all rights reserved.

    社群 sharing

    ::: Copyright National Central University. | 國立中央大學圖書館版權所有 | 收藏本站 | 設為首頁 | 最佳瀏覽畫面: 1024*768 | 建站日期:8-24-2009 :::
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback  - 隱私權政策聲明