本篇論文為探討在雙面拋光的藍寶石基板上，透過有機金屬化學氣相沉積法(Metal Organic Chemical Vapor Deposition, MOCVD)，所成長之氮化鎵/氮化銦鎵(GaN/InGaN)多重量子井，蒸鍍上金、銀交錯的金屬層，再利用退火、濕蝕刻製程，產生具奈米孔洞的黃金層。此奈米金屬層能與量子井產生局部表面電漿共振 (Localized Surface Plasmon Resonance, LSPR)，提升螢光分子附近的局部電場強度。 我們以光致螢光頻譜(photoluminescence)，探討表面折射率變化所造成的光譜強度變化，同時藉由掃描式電子顯微鏡(scanning electron microcopy)，觀察奈米孔洞金屬的表層結構。為了要驗證LSPR效應，我們將R6G (rhodamine 6G)螢光分子塗佈在奈米孔洞金屬表面，以拉曼頻譜分析R6G所產生的散射訊號。我們發現: 與平坦的黃金層相較，奈米孔洞金屬層並沒有明顯增強R6G的散射強度，此結果顯示金屬層的孔洞直徑、密度、分佈面積都需要更多的製程優化，才能產生有效的LSPR效果。 ;This research is aimed to induce the effect of localized surface plasmon resonance (LSPR) on InGaN/GaN multiple quantum wells (QWs). The QWs were grown on double-sided polished sapphire substrates by metal organic chemical vapor deposition (MOCVD). To induce LSPR, the metal layer consisting of alternating Au/Ag is deposited on the QW wafer, followed by the annealing and etching process, producing a nanoporous Au structure. Using the photoluminescence (PL) spectra, we study the effect of surface refractive index on the emission intensity from QWs. We also observe the nanoporous Au fabricated with different annealing/etching conditions by scanning electron microscopy (SEM). In order to verify the LSPR effect, we applied rhodamine 6G (R6G) molecules on the nanoporous Au and studied the resultant Raman spectra. Comparing the spectra on flat Au film, the Raman intensity of R6G on the nanoporous Au is not increased. This result suggests that the dimensions, density and effective area of the nanoporous Au have to be further optimized.
