;Through-mask electrochemical micro machining (TMEMM) is different from the normal Electrochemical micro machining (EMM). The design expense of the electrode tool can be saved because the electrode tool won’t be affected by the shape of the ending product. Without changing the electrode tool, TMEMM can fulfill end product with any shape by only changing the shape of the electric insulated mask. The development of through-mask electrochemical micro-machining is restricted in the static processing. The size of the tool needs to be the same as the processing zone. However, the electrode of the tool is required to be a good conductivity metal, which is expensive. Based on the cost, in this study, I try to reduce the size of the tool along with a moving speed. The electric field model with temperature field and flow field of through-mask electrochemical micro-machining with a moving tool is simulated by using finite element method. Effects of parameters, such as: applied voltage, velocity of electrolyte, mask thickness and moving speed etc…, on the resulted holes are investigated.
The simulation results show that the higher the voltage, the deeper the processing depth, and the island ratio decreases with the increase of voltage; the lower the electrolyte flow rate, the higher the electrolyte temperature in the processing zone, and the island ratio increases; the mask thickness increases. Thicker, the better the shielding ability of the mask, the smaller the local current density, the shallower the processing depth, the smaller the island ratio; the slower the moving speed, the longer the processing time, the deeper the processing depth, the more uniform, the island ratio the smaller. Compared to the same machining depth, the fixed tool has less machining time than the moving tool, but the moving tool can make the machining hole have a smaller island ratio.