石英材料具有優異的物理特性，例如優越的光學性能，高透紫外線，優越的壓電特性、化學穩定性極佳等優良物性，因此近年常被使用於各類感測元件或微機電系統所需之關鍵材料。唯因石英之材質硬脆，屬難加工材料，利用傳統機械加工方法很難避免微裂發生，特別是在必須兼顧「高效率，高精度」的需求時，更不可得，因此針對石英玻璃發展一種加工時不會因機械力破壞而產生龜裂的新型加工方法是重要的課題。電化學放電加工法則是一種非機械加工法，利用放電能量可大幅提高局部電解液溫度，而加速玻璃蝕刻速度的一種複合加工法(放電+電化學)，相當適合於硬脆特性的石英玻璃加工。一般而言，當電化學放電加工時，工具電極周邊的電解液會有劇烈電解現象，而持績產生氣泡,工具電極外圍因此受到電解氣泡聚集而形成類似絕緣氣膜包覆，終致使電極表面的電流密度遞增而引發放電火花。此火花能量可提高電解液的蝕刻速度，進而大幅增加石英玻璃的材料移除速度。先前的研究顯示，電化學放電加工法的材料移除是否能持續且穩定，取決於工具電極周圍包覆氣膜之結構特徵與包覆的穩定性，唯此機理仍有甚多不明之處，急待進一步解明，此亦是本研究計畫的目的之一。本計畫的主要目的是擬利用微形超硬合金為工具電極，對石英材料進行微孔加工，深入理解，並解析電化學放電加工法應用在非導電体的石英材料的可行性及其具体的加工機制。此外，由於電化學放電加工法必須藉腐蝕性電解液才能執行材料移除，而此類電解液非酸即鹼，對環境衝擊性高，後處理成本高昂，因此電解液使用量越少越好。本研究亦將探討一種電解液需求量極少，對環境友善的綠色電化學放電加工法。總而言之，本計畫預定執行期間為一年，所擬探討主要項目包括有: 1.電解液的循環狀態，電氣參數及工具電極的表面精度等對絕緣氣膜結構有何影響進行觀察及分析。 2.探討氣膜結構狀態對石英材料電化學放電加工特性的影響。 3.探討一種加工石英玻璃僅需微量電解液的綠色電化學放電加工法的可行性。 4.探討石英材料微孔成型精度及其相關機理。 ;Quartz, being hard and brittle, is difficult to machine. It is more difficult to machine between the efficiency and accuracy using conventional methods. Electrochemical discharge machining (ECDM) is an emerging non-traditional machining process that involves high-temperature melting assisted by accelerated chemical etching. The electrochemical reaction affects the coalesce status of gas film in ECDM. The structure of gas film is in turn affected by efficiency and accuracy. In the literature, most studies concerning ECDM focus on factors influencing machining performance and strategies for quality enhancement. Most of the current research on ECDM focuses on strategies for verifying the drilling process and enhancing machining quality. Comparatively, studies on Electrochemical Discharge Machining（ECDM）are few. In fact, the environment of the micro electrode in ECDM system is more complex, posing problems to quality control of gas film structure as well as smooth circulation of electrolyte. Hence how to overcome these problems when applying Micro ECDM to the machining process is worth further investigation. Therefore, according the above issues, these researches will be studied.1. Explore the flow of electrolyte affect the processing of quartz glass, and to examine the effect of gas film on machining performance.2. Explore the influence of different electrolyte flow machining quartz glass within the process and added in the electrolyte conductive powder, explore its machining mechanism, thereby improving precision machining degree.3. Composite processing methods within quartz micro hole, Improve machining efficiency and accuracy, Flow control using electrolyte membrane structure and improving the insulating gas within the machining area electrolyte circulation difficulties, breakthrough Existing electrochemical discharge machining mechanism, establish micro-slit precision quartz microfabrication technology.
