3-D曲面玻璃之鍍膜均勻性;Coating uniformity of 3-D curved glass

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/82864

Title:	3-D曲面玻璃之鍍膜均勻性;Coating uniformity of 3-D curved glass
Authors:	莊天仁;Chuang, Tien-Jen
Contributors:	照明與顯示科技研究所
Keywords:	電子束蒸鍍;3-D曲面玻璃;行星式式旋轉基板支撐架;均勻性;抗反射膜;Electron beam evaporation coater;3-D curved glass;Planetary rotating substrate holder;Uniformity;Anti-reflected coating
Date:	2020-01-15
Issue Date:	2020-06-05 17:26:24 (UTC+8)
Publisher:	國立中央大學
Abstract:	近年來隨著智慧型產品蓬勃發展，以3-D曲面型玻璃為顯示器的智慧型裝置逐漸成為趨勢，而在非平面物體上的光學薄膜製鍍過程會因為薄膜厚度的差異導致色差產生。本研究目的在對於3-D曲面玻璃探討光學薄膜分布，利用行星式旋轉基板支撐架並且使用電子束蒸鍍腔，分別蒸鍍Ta2O5與SiO2兩種材料，從蒸發源與基板的幾何關係及蒸發源發射特性來對膜厚分佈建立關係式，亦有不同傾斜角度所造成不同的均勻性變化，並找出較佳均勻性的傾斜角度，再利用關係式所的到結果進行模擬，並且沉積4層抗反射膜於3-D曲面玻璃，再藉由量測分析光譜穿透率。;In recent years, as the rapid development of smart devices, the applications of 3-D curved glass on display have become a trend gradually. The optical film deposited on the 3-D curved glass performs color differences due to the difference in the film thickness. The purpose of this research is to study the distribution of optical films on the 3-D curved glass. The electron beam evaporation coater was with a planetary rotating substrate holder used to deposit two materials, Ta2O5 and SiO2. From the geometric relationship between the evaporation source and the substrate holder, the film thickness distribution was calculated. The different inclined angles of the substrate angle were analyzed to achieve a better thin film uniformity. Finally, a 4-layer anti-reflected coating was deposited on the 3-D curved glass, and the spectral transmittance is with good uniformity.
Appears in Collections:	[Institute of Lighting and Display Science ] Electronic Thesis & Dissertation

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