在大型精密光學系統檢測中，常使用干涉儀作檢測工具，利用參考光與待測光的光程差（Optical Path Difference, OPD）產生干涉條紋，並以其干涉條紋變化量來重建波前並分析樣待測系統資訊。另一種量測方法為波前量測，其Shack-Hartmann波前檢測器即為其中一種，紀錄參考光與待測光通過微透鏡陣列聚焦到感光元件上的光點位置，計算兩者的位移量即可得到該透鏡所擷取到的波前斜率，並以此重建待測波前分析像差。 儘管干涉儀以高量測精度聞名，且因Shack-Hartmann波前檢測器量測空間解析度受微透鏡陣列所限制，故干涉儀空間解析度也比Shack-Hartmann波前檢測器優良許多，但因其本身體型巨大以及較低的動態範圍限制，在某些大型光學系統量測中並不適用，且在實際使用上，依照不同的待測元件，干涉儀需更換不同的標準鏡以匹配該元件，若待測元件為雙曲面或橢圓面等非球面鏡，還須搭配Null Optics才能量測，在使用彈性及方便度這方面Shack-Hartmann波前檢測器更勝一籌。 因此，為評估Shack-Hartmann波前檢測器應用於中大型光學系統檢測之可行性，本論文利用本實驗室開發的高動態範圍Shack-Hartmann波前檢測器量測中大型光學鏡片及已光機整合之光學系統，並利用相機曝光控制達到高動範圍取像，並將其重建波前資料與Fizeau干涉儀H2000比對，也額外量測商業鏡頭並以重建波前輸出全域MTF，並與MTF儀作性能比較。 ;In the detection of medium and large optical systems, two of the most representative measuring devices are the interferometer and Shack-Hartmann wavefront sensor. The interferometer works by merging two or more sources of light to create an interference pattern for accessing information of the optical system by analysis the pattern. The Shack-Hartmann wavefront sensor (SHWFS) is a simple yet effective device to measure the optical wavefront. SHWFS can record the spot locations which cause by the reference wavefront and aberration wavefront passing through the micro lens array (MLA), respectively. It relies on the difference between the two locations to analyze the optical aberration. Even though the interferometer is well known for its superior precision and the resolution is more pronounced than SHWFS, it is applicable to limited situation due to its large shape and lower dynamic range. Thus, we use SHWFS combined high dynamic range technique (HDR-SHWFS) to measure medium and large optical systems like large concave mirror and collimator system and compare these data with interferometer. In this study, we also measure the aspherical lens which is unmeasurable through interferometer, and we compare the data with the simulator. At last, we measure the full frequency MTF of some business lens and compare with the MTF measurement equipment.
