矽晶表面粗糙化結構可有效增強可見光波段之光捕捉效應，使其被廣泛應用太陽能電池及可見光偵測器上。然而，矽晶半導體之能隙為1.12 eV，它對紅外光具有高穿透性，這限制了其在近紅外光波段內的應用。因此，近來許多研究致力於在矽晶表面製造不同粗糙化奈米結構，試圖將其光吸收範圍從可見光波段延伸到近紅外光波段。另一方面，可撓曲矽晶電子產品因其在可彎曲顯示器和穿戴式感測器等應用潛力很大，相關研究近來也受到很大的關注。因此，本計畫將設計開發新穎低溫金屬催化蝕刻與無電鍍製程技術，製備出表面平整且可彎曲之薄型矽單晶晶片，並在其上製備各式新穎可彎曲金屬奈米粒子/矽晶異質奈米結構陣列與紅外光奈米感測元件。同時，藉助各式材料分析與性質量測儀器有系統地探討在不同彎曲條件作用下，對元件形貌、微結構，及其對應之表面親疏水性質和紅外光紅外光偵測特性等影響。 ;Single-crystalline Si substrate with textured surface possesses good visible light-trapping property, making it widely used in solar cells and visible light detectors. However, Si has a bandgap of 1.12 eV, it is highly transparent to infrared (IR) light, which limits its application in the near-IR spectral range. Thus, many recent research efforts have been devoted to fabricating surface-textured Si nanostructures, which attempt to extend their light absorption range from the visible to the near-IR region. On the other hand, flexible Si electronics have gained considerable attention because of their potential applications in bendable displays and wearable sensors. Therefore, in this project, particular emphasis will be focused on developing novel low-temperature metal-catalyzed etching and electroless plating techniques for the fabrication of flexible thin Si substrates with a smooth surface, and various novel flexible metal nanoparticles/Si nano-heterostructure arrays and infrared nanodetectors. The effects of different bending conditions on the surface morphologies, microstructures, surface wettability, and infrared photo-detection properties of the produced novel flexible Si-based nanodevices will also be systematically investigated.
