本研究開發基於平面式磁通閘之三軸磁力計，利用磁傳導器將出平面磁場導入平面式磁通閘，並透過不同線圈搭配及平面磁芯黏貼位置的改變，達到不同軸向之量測，同時降低彼此之相互干擾。利用PCB製程與3D列印技術，以降低元件製作上的誤差。本研究承襲實驗室之前的研究基礎，成功達到降低元件面積尺寸及提升出平面磁場量測之靈敏度的目標。同平面軸向的線性量測範圍至130 T，靈敏度分別為257.1 V/T及468.8 V/T，出平面軸向於線性量測範圍至140 T，靈敏度為258.8 V/T，其非線性度小於10%。並利用模擬軟體分析磁力線趨勢，再對磁傳導器進行設計，並透過實驗加以佐證。;This research proposed a three-axis fluxgate magnetometer based on a planar fluxgate magnetometer. This research adopts PCB process to improve the stability of the process and reduces component errors. The magnetic conductor is used to conduct the out-of-plane magnetic field into the planar fluxgate. Through the connecting of different coils, the measurement of different axis magnetic field can be achieved, and also the mutual interference between each axis can be reduced. This research is based on the previous works in the laboratory, and successfully achieved the goal of reducing the area size of the components and improving the sensitivity of out-of-plane magnetic field measurement. The presented sensor shows the 257.1 V/T sensitivity for the x-axis, 468.8 V/T sensitivity for the y-axis, and 258.8 V/T sensitivity for the z-axis with nonlinearity less than 10% in the linear range of 130 μT.
