本研究旨在建立一套非破壞性、非接觸式的樣品內部熱源空間位置估計量測系統。鎖定熱成像是一種強大的非破壞性和非接觸式檢測技術,用於檢測物體的內部熱源。 並測量物體表面的溫度場,可以估計內部熱源的位置和深度,使用紅外熱像儀用於測量物體表面發出的熱輻射,量測樣品所有表面溫度的特點。利用Lock-in Thermography取得樣品之振幅與相位空間分布圖,並利用計算方法與數值法估計樣品內部熱源的空間位置,並且使用模擬與實驗結果進行比較確認。;Lock-in thermography is a powerful non-destructive and non-contact detection technology used to detect the internal heat source of the object. and measuring the temperature field on the surface of the object, the position and depth of the internal heat source can be estimated. Use an infrared thermal imager to measure the thermal radiation emitted from the surface of a sample, and to measure the characteristics of all surface temperatures of the sample. The spatial location of the heat source inside the sample was estimated using Lock-in Thermography and confirmed using simulation and experimental results.