雷射加工電阻以視覺辨識方式調制阻值之研究;Research on Modulating Resistance Values in Laser Processing of Resistors through Visual Recognition

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题名:	雷射加工電阻以視覺辨識方式調制阻值之研究;Research on Modulating Resistance Values in Laser Processing of Resistors through Visual Recognition
作者:	鄔宗儒;Wu, Tsung-Ju
贡献者:	光電科學與工程學系
关键词:	視覺辨識;雷射修阻;共軛焦顯微鏡;探針量測;Visual recognition;Laser trimming;Confocal microscopy;Probe measurements
日期:	2023-07-24
上传时间:	2024-09-19 15:46:41 (UTC+8)
出版者:	國立中央大學
摘要:	一般市場上常見的雷射修阻機結構是將電阻計和雷射切割機結合，在修阻中即時回饋數據，以達到目標電阻值。這種方法是以減少截面積的寬度來提高電阻值而達到目標值，通常是以邊修阻、邊量測的方式來降低阻值誤差。本研究探討使用視覺辨識監控的方法；以光學量測尺寸直接控制加工，取代邊以探針量電阻值來控制雷射修阻加工方式；驗證是否可以達到相同效果，除了可降低探針成本，更大幅提高加功效率。在本實驗中，我們使用膜厚儀、共軛焦顯微鏡模擬視覺辨識結合雷射切割機對厚膜電阻進行測試。我們利用電阻截面積公式和設定的截面寬度修減量來驗證電阻是否接近實驗目標值。同時，我們設定了多個樣本數，以探討阻值誤差比率。實驗結果證明，(1)以視覺量測控制加工所的到的阻值99%都可達到±2.5%的公差範圍內。(2) 以±1%公差範圍視計算，視覺量測控制加工所得到的阻值與傳統探針量測控制已達到70%的可靠度。(3)簡化探針治具節省金額在數十到百萬台幣。 ;The common structure of a laser resistor trimming machine found in the general market is the integration of a resistance meter with a laser cutting machine. This setup provides real-time feedback during the trimming process to achieve the target resistance value. The method used in this process involves reducing the width of the cross-sectional area to increase the resistance value and reach the desired target value. Typically, this is accomplished by simultaneously trimming the resistor while measuring, thereby reducing resistance value errors. In this research, we explore the use of a visual recognition monitoring approach, where optical measurements directly control the processing, replacing the traditional method of using probes to measure resistance values during laser resistor trimming. We aim to verify if this approach can achieve the same results, not only reducing probe costs but also significantly improving processing efficiency. In our experiment, we use a film thickness gauge and confocal microscopy to simulate visual recognition combined with laser cutting for testing thick-film resistors. We validate whether the resistance approaches the experimental target value by employing the resistance cross-sectional area formula and setting the width reduction amount. Additionally, we set multiple sample sizes to examine resistance value error ratios. The experimental results demonstrate that (1) using visual measurements for process control can achieve resistances within a ±2.5% tolerance range of the target value in 99% of cases. (2) When considering a ±1% tolerance range, the reliability of visual measurements for process control is already at 70% compared to traditional probe measurements. (3) Simplification of probe fixtures leads to cost savings ranging from tens to millions of New Taiwan Dollars.
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