光學生物檢測技術在生物、醫學領域方面受到越來越多的重視與廣泛的應用，能夠深入觀察分子與物質之間的交互作用並進行數據分析。本論文初始以偏振式Linnik動態干涉儀量測437.6nm階高的標準片，平均值為437.53nm，誤差為-0.017%。量測樣品厚度79.96nm的金薄膜，平均值為80.61nm，其誤差0.82%，由此可判定量測系統穩定。研究厚度79.96nm的金薄膜在不同濃度下的甘油水溶液中的階高變化。 以反射相位會因為折射率的改變，使得原始量測到的金膜厚度會隨著濃度變化而改變。後來因參考臂的補償片只能補償到樣品臂所產生的像平面平移，沒辦法補足樣品臂中的玻璃光程以及更換樣品介質的光程，因此後續系統會轉變為Twyman-Green 干涉儀架構，最終量測的靈敏度為84.226 nm/RIU，檢測極限為6.248E-3 RIU。後續依此系統去做預測，最終的靈敏度可達9E+3nm/RIU，檢測極限可達到6.366E-5 RIU，最後還有討論一些對研究架構、製具規格和提高靈敏度與檢測極限的探討與改良。 ;The optical biometric detection technology is receiving increasing attention and finding widespread application in the fields of biology and medicine. It enables a deeper observation of the interactions between molecules and substances, along with the ability to perform data analysis. This paper initially employed a polarized Linnik dynamic interferometer to measure a standard wafer with a step height of 437.6 nm. The measured average height was 437.53 nm, with a deviation of -0.017%. For the measurement of a gold thin film with a thickness of 79.96 nm, the average thickness was 80.61 nm, with a deviation of 0.82%. This confirms the stability of the measurement system. The study examined the step height variations of a 79.96 nm thick gold film in glycerol-water solutions of different concentrations. Due to changes in refractive index, the reflection phase caused the originally measured thickness of the gold film to vary with concentration. Later, as the compensatory piece in the reference arm only compensated for the lateral shift produced by the sample arm and could not account for the glass optical path within the sample arm or changes in optical path due to altering the sample medium, the subsequent system transitioned to a Twyman-Green interferometer architecture. The final measured sensitivity of the system was 84.226 nm/RIU, with a detection limit of 6.248E-3 RIU. Following this system, predictions were made, indicating a potential final sensitivity of 9E+3 nm/RIU and a detection limit of 6.366E-5 RIU. Finally, there was a discussion of improvements related to research structure, tool specifications, and enhancing sensitivity and detection limits.
