除此之外，我們也研究奈米球微影的製程步驟，我們使用實驗室的奈米球自組裝排列出大面積的奈米球週期陣列，利用黃光微影製程的曝光顯影來製作出光阻孔洞，並使用斜向蒸鍍Cr來維持孔洞大小及做為氧電漿蝕刻時光阻孔洞的保護層，再正向鍍SiO2、Ag來製作出足夠小顆的Ag，並在暗場顯微鏡下觀察金屬的散射光來確認disk上的銀是否足夠小顆。 ;Perovskite solar cells have rapidly become a major research and development focuses for next generation solar cells technologies. One of the major advantages for perovskite solar cells is the relatively easy and low-cost to fabricate. In this research, we investigate a vacuum-based method to synthesize perovskite thin films. In addition, the electrical characteristics of perovskite solar cells fabricated using various method are also investigated. The second research topics in this research is to fabricate composite nano-cone arrays using Nanospherical-Lens Lithography. In this study, we modified the existing nanofabrication procedures by sequential evaporation of different materials to obtain composite nano-cone arrays. The effects of the initial diameters of the photoresist holes and the thickness of the evaporated materials are carefully investigated. The composite nano-cone arrays cover large area, which can be used in several topics in the field of Nanophotonics and biosensing.
