| 摘要: | 本研究旨在開發高靈敏度、多功能的光纖感測器，以克服現有電子式感
測器的問題。主要研究目標包括使用側磨拋光技術製作D形多模和單模光
纖，並應用電子鎗蒸鍍技術沉積不同材料（如????2??5、??????2、????3）的單層
薄膜於光纖拋光面，進而設計及製作高靈敏度漸逝波(Evanescent Wave)與損
耗模態共振（LMR）的光纖感測器。本研究設計開發新型的葡萄糖水溶液
折射率、環境溫度和二氧化碳濃度三種光纖感測器，並優化感測器的製程參
數以提升其靈敏度和性能。實驗結果顯示，這些光纖感測器在葡萄糖水溶液
折射率、環境溫度和二氧化碳濃度感測方面均具有較高的靈敏度，顯示出在
環境參數監測中的潛力。
本研究於D形單模和多模光纖上鍍製100 nm ????2??5薄膜，測得葡萄糖
水溶液折射率感測的靈敏度分別為6406.44 nm/RIU和27.723 dB/RIU；在環
境溫度感測方面，鍍製80 nm ??????2薄膜的D形光纖感測器在30℃至150℃
範圍內，單模和多模光纖的靈敏度分別為1.61 nm/℃和7.68×10-3 dB/℃；在
二氧化碳濃度感測方面，鍍製 90 nm ????3薄膜的 D 形光纖感測器在 500
ppm至9000 ppm範圍內，單模和多模光纖的靈敏度分別為3.56 counts /ppm
和3.18 counts /ppm。本研究結果顯示，不同金屬氧化物薄膜應用於側磨D
形光纖感測器能夠有效地提升特定環境參數的靈敏度，並在抗電磁干擾、高
靈敏度、耐環境性、安全性、遠距離傳輸和高速監測等方面具有優勢。;This study aims to develop highly sensitive and multifunctional fiber optic
sensors to overcome the issues associated with existing electronic sensors. The
main research objectives include the fabrication of D-shaped multimode and
single-mode fibers using side-polishing techniques and the deposition of various
materials (such as ????2??5 ??????2, ????3) as single-layer thin films on the polished
surfaces using electron gun evaporation. This will lead to the design and
fabrication of high-sensitivity evanescent wave and loss mode resonance (LMR)
fiber optic sensors. The study involves designing and developing three types of
novel fiber optic sensors for glucose solution refractive index, ambient
temperature, and carbon dioxide concentration, as well as optimizing the sensor
fabrication parameters to enhance sensitivity and performance.
Experimental results indicate that the proposed fiber optic sensors exhibit
high sensitivity in detecting the refractive index of glucose solutions, ambient
temperature, and carbon dioxide concentration, demonstrating their potential in
environmental parameter monitoring. For glucose solution refractive index
sensing, D-shaped single-mode and multimode fibers coated with 100 nm ????2??5
thin film, the sensitivity is 6406.44 nm/RIU and 27.723 dB/RIU, respectively. For
temperature sensing in the range of 30°C to 150°C, D-shaped fiber optic sensors
coated with 80 nm ??????2 thin film showed the sensitivity is 1.61 nm/°C and
7.68×10-3 dB/°C for single-mode and multimode fibers, respectively. For carbon
dioxide concentration sensing in the range of 500 ppm to 9000 ppm, D-shaped
fiber optic sensors coated with 90 nm ????3 thin film exhibit the the sensitivity is 3.56 counts/ppm and 3.18 counts/ppm for single-mode and multimode fibers,
respectively.
This study′s results indicate that applying different metal oxide films on side
polishing D-shaped fiber optic sensors can effectively enhance the sensitivity to
specific environmental parameters. These evanescent waves and LMR fiber-optic
sensors have advantages in terms of electromagnetic interference resistance, high
sensitivity, environmental durability, safety, long-distance transmission, and high
speed monitoring. |
