| 摘要(英) |
The structure of traditional optical filter is mainly stacked by multi-thin-film, using the interfered phenomenon produced by the structure of stacked thin-film to get the effect of filtering light wave.Nevertheless, due to large size elements are frequently used in producing stacked thin-film structure, it is hard to combine with MEMS that is a tiny element by coating, to seriously allow for the factors such as refraction index, thickness, homogeneity and even stress between thin-film in each layer is necessary. In order to simplify the structure, this thesis represents Si-Based Free-Standing
Guide-Mode Resonance Filter which total thickness is about 1 μm .
Comparing with traditional optical filter stacked by multiple thin-film,when using Free-Standing Guide-Mode Resonance Filter, its structure become more uncomplicated and producing progress get more handy.Moreover, structure parameter can be exactly controlled as well.On design of Free-Standing Guide-Mode-Resonance Filter in this thesis, Q factor of structural spectrum can be promoted about 50% by adding low cladding layer. This thesis experimented to prove iv practicability of the design. Besides, this thesis controls the thickness of lower cladding layer to raise the transmission efficiency of sideband and make transmission efficiency more than 90% when wavelength is
from 1.2 - 2.0 μ m . Differing from traditional Guide-Mode
Resonance Filter, the sideband of high transmission efficiency can be increased around 400 nm with promoting the filter efficiency in a broadband. A Suspended-Membrane Type Guide-Mode Resonance Filter with lower cladding layer can be realized to substitute the traditional filter by our design, analysis, fabrication and measurement results. In addition, the practicability of Free-Standing Guide-Mode-Resonance Filter can be generally applied and its value and competitiveness will increase in market application. |
| 參考文獻 |
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